Temporal extension of stable glow discharges in fluorine-based excimer laser gas mixtures by the addition of xenon

Abstract

The effect of addition of xenon on the long term homogeneity of discharges in F 2 and ArF excimer laser gas mixtures was investigated in a small-volume discharge chamber. The gas mixture in the discharge chamber was preionized by X-rays. A special electrical excitation circuit containing a pulse forming line provided a long, squareshaped current pumping pulse of a predetermined duration to the discharge electrodes. The initiation and the development of the discharge was monitored via its fluorescence signal with an intensified CCD camera. We found that adding Xe up to partial pressures of 0.53 mbar extended the homo-

Photo-triggering and secondary electron produced ionization in electric discharge ArF* excimer lasers

“…Adding larger amounts of Xe to the point of intercepting significant amount of discharge power decreases laser power output. 23,24 In models of excimer lasers, photon produced preionization has typically been represented by a spatially uniform initial electron density at the time the voltage pulse is applied. In photo-triggering, preionization is a dynamic process that can have significant and mutual influence on the main laser discharge it triggers.…”