The fabrication of more and more miniaturized electronic and photonic devices relies on new, ingenious methods for the fabrication of spatially controlled nanostructures. Examples are electronic devices based on semiconducting nanowires and photonic devices based on chains of metallic nanoclusters that guide light by coupled surface plasmons. In this contribution a template-directed ion beam synthesis of nanowires and regular nanocluster chains will be presented. As templates, V-grooves etched in (001)Si and …
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