Technology for Fast Fabrication of Glass Microhotplates Based on the Laser Processing

Latest Progress in Sensors for Pre-explosive Detection of Flammable Gases: A Review

“…1(b). (20) The substrates were 30-μm-thick boron-silicate glass with transformation temperature T g = 720 ℃. 4"-Square size wafer was diced with a diamond saw into 4 pieces.…”

“…(19) (b) Schematic diagram of heating element after laser processing. (20) (c) Diagram (with dimensions) of a sensor structure based on MEMS technology. (17) (a)…”

“…(25)(26)(27) Recently, articles on more unusual membrane materials such as ZrO 2 /Y 2 O 3 and borosilicate glass have been published; however, the softening temperature of the latter is below 600 ℃. (20,28) In the past decades, a large number of different semiconductor sensors have been developed to monitor hydrocarbons in the air. Nevertheless, there are different directions of development (sensor design, base and sensitive-layer materials, heating methods, and sensitive element spreading), including sensors to detect methane, (9,10,(15)(16)(17) ethanol, (11,12,29,30) propane, (11,31) formaldehyde, (13) and other chemicals.…”

“…(a) Ceramic microelectromechanical system (CeraMEMS) microcircuit based on a thin film of aluminum oxide (1) a ceramic substrate 0.6 mm thick with holes; (2) a layer of glass binder;(3) a thin film of aluminum oxide produced by electrolysis by spark oxidation of aluminum; (4) gas-sensitive layer;(5) laser-drilled hole; (6) platinum heater in the form of a meander; (7) contact pads to the heater and digit electrode; and (8) digit electrode to the sensitive layer (19). (b) Schematic diagram of heating element after laser processing (20). (c) Diagram (with dimensions) of a sensor structure based on MEMS technology (17).…”

Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology

“…Sensor of such type consists of the microhotplate responsible for level of power consumption and working temperature parameters, gas sensitive layer and the package. Today already developed a few approaches [1] for low power ceramic MEMS microhotplates made from membrane materials like ZrO2 [2], Al2O3 [3], LTCC [4], SiO2 [5] based on non-standard or clean room technologies. Opposite our approach with laser micro milling technology gives wide flexible possibilities to fabricate custom MEMS microhotplate platform and also packages for MOX sensor from monolithic ceramic materials, that gives complete solution for integration one in devices using IoT conception.…”