MRS Proc. 1998 DOI: 10.1557/proc-524-31 View full text
S. Tamura, K. Ohtani, M. Yasumoto, K. Murali, N. Kamuo, H. Kihara, K. Yoshida, Y. Suzuki

Abstract: ABSTRACTA hard X-ray microbeam with submicrometer spot size from synchrotron radiation (SR) sources is expected to add a new dimension to various X-ray analysis methods. A Fresnel zone plate (FZP) is one of the promising focusing elements for X-rays. In order to develop high performance multilayer FZP for use in the hard X-ray region, Cu/Al concentric multilayers were fabricated by use of a DC sputtering deposition process. Lower Ar gas pressure or higher rotating speed of a wire substrate has been effective i…

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