2004
DOI: 10.1016/j.apsusc.2003.10.048
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Surface modifications of TiN coating by the pulsed TEA CO2 and KrCl laser

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Cited by 21 publications
(10 citation statements)
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“…The effect of μs pulses generated with a CO 2 laser on TiN coatings demonstrated a melt dominant material removal mechanism [9][10][11], although the resulting machining quality was far from that required for high-precision micromachining. It was reported that ns pulses generated with KrCl (λ = 222 nm) [10] and XeCl (λ = 308 nm) [11] excimer lasers generated significantly smaller melt fractions generated in comparison to μs pulses. Kononenko et al [12] compared the effect of ns and ps pulse durations using combinations of UV (270 nm), visible (539 nm), and IR (1078 nm) wavelengths.…”
Section: Introductionmentioning
confidence: 98%
“…The effect of μs pulses generated with a CO 2 laser on TiN coatings demonstrated a melt dominant material removal mechanism [9][10][11], although the resulting machining quality was far from that required for high-precision micromachining. It was reported that ns pulses generated with KrCl (λ = 222 nm) [10] and XeCl (λ = 308 nm) [11] excimer lasers generated significantly smaller melt fractions generated in comparison to μs pulses. Kononenko et al [12] compared the effect of ns and ps pulse durations using combinations of UV (270 nm), visible (539 nm), and IR (1078 nm) wavelengths.…”
Section: Introductionmentioning
confidence: 98%
“…Many research projects have been conducted to convert laser power into quantitative thermal energy. 10,11 The ratio of interstitial and substitutional carbons could be adjusted to improve the hardness, wear resistance, and elastic modulus in the carbon-doped TiZrN coating. So, it is important to study the behavior of doping carbon in terms of the electronic structure and the bonding state.…”
Section: Introductionmentioning
confidence: 99%
“…and Shinn M. studied the process of laser nitriding of metals by different lasers with the wavelengths in a range from 0.3-3.0 µm [51]. They found that for some metals the wavelength strongly effects the irradiation and efficiency of the nitriding process.…”
Section: Introductionmentioning
confidence: 99%
“…However, commonly reported problems refer to cracking of hard nitrided surface layers, and also to excessive roughness of such layers. Despite many years of research, the problem is still present, as evidenced by the number of publications that still appear in the world literature [1][2][3][21][22][23][24][25][26][27][28][38][39][40][41][42][43][44][45][46][47][48][49][50][51][52][53][54][55].…”
Section: Introductionmentioning
confidence: 99%