2005
DOI: 10.1016/j.apsusc.2005.01.029
|View full text |Cite
|
Sign up to set email alerts
|

Surface modifications of TiN coating by pulsed TEA CO2 and XeCl lasers

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
16
0

Year Published

2007
2007
2016
2016

Publication Types

Select...
7
2

Relationship

0
9

Authors

Journals

citations
Cited by 24 publications
(16 citation statements)
references
References 12 publications
0
16
0
Order By: Relevance
“…The effect of μs pulses generated with a CO 2 laser on TiN coatings demonstrated a melt dominant material removal mechanism [9][10][11], although the resulting machining quality was far from that required for high-precision micromachining. It was reported that ns pulses generated with KrCl (λ = 222 nm) [10] and XeCl (λ = 308 nm) [11] excimer lasers generated significantly smaller melt fractions generated in comparison to μs pulses. Kononenko et al [12] compared the effect of ns and ps pulse durations using combinations of UV (270 nm), visible (539 nm), and IR (1078 nm) wavelengths.…”
Section: Introductionmentioning
confidence: 99%
“…The effect of μs pulses generated with a CO 2 laser on TiN coatings demonstrated a melt dominant material removal mechanism [9][10][11], although the resulting machining quality was far from that required for high-precision micromachining. It was reported that ns pulses generated with KrCl (λ = 222 nm) [10] and XeCl (λ = 308 nm) [11] excimer lasers generated significantly smaller melt fractions generated in comparison to μs pulses. Kononenko et al [12] compared the effect of ns and ps pulse durations using combinations of UV (270 nm), visible (539 nm), and IR (1078 nm) wavelengths.…”
Section: Introductionmentioning
confidence: 99%
“…The secondary stage includes cell-cell attachment, which is formed by an extracellular matrix (ECM) such as fibronectin, vitronectin, etc., that acts as a protein adhesive between the cells and thus creates hydrogen bonding. However, during the past decade, laser treatment has become a promising technique for materials processing [12][13][14][15] and play an important role in improving the biocompatibility of biometals [16][17][18].…”
Section: Introductionmentioning
confidence: 99%
“…This means to achieve efficient removal of SEI from the surface, the laser parameter should be set to be within appropriate fluence, pulse duration repetition rate, and the absorptivity of the particles to be removed. Any materials undergoing laser surface structuring exhibit a characteristic threshold for ablation called the threshold fluence [38,39]. The laser parameters must be set that the laser energy is above a critical threshold for deabsorption of SEI compositions but below the damage threshold of electrode.…”
Section: Methodsmentioning
confidence: 99%