Surface micromachined Fabry-Perot tunable filter

Tran, Alex; Lo, Yu‐Hwa; Zhu, Z.H.; Haronian, D.; Mozdy, E.

doi:10.1109/68.481128

Cited by 92 publications

(30 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Fabrication and electronic modulation of such a narrow airgap between the two mirrors is severely hindered by capillary forces inside of the cavity. Also, electrostatic pull-in and subsequent sticking of the two mirrors limits the operating range of the device to one third of the initial air gap [3][4]. These problems explain the interest in implementing solid-state UV optical filters in post-processing steps after to complete the fabrication of the UV photodetector and electronics in a standard technology.…”

Section: Introductionmentioning

confidence: 99%

“…Such microspectrometers will offer significant advantages over existing instruments, including size reduction, low cost, fast data-acquisition and high reliability. Previously developed microspectrometers [1][2][3][4], fabricated using bulk or surface micromachining, contain movable parts to perform wavelength tuning or filtering functions. As a result, these are less reliable and suitable only for operation in a limited spectral band (mostly near-IR and visible).…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

UV Bandpass Optical Filter for Microspectometers

2007

View full text Add to dashboard Cite

This paper describes the design and modeling of a UV bandpass optical filter for microspectrometers. The materials used for fabricating the multilayer UV filter are: silicon dioxide (SiO 2 ), titanium dioxide (TiO 2 ) and yttrium oxide (Y 2 O 3 ). The optical filter shows a bandpass response wavelength in the range 230-280 nm, with a transmittance higher than 80%. Such a device is extremely suitable for optical detection of biological molecules with optical absorption or/and fluorescence in the UV spectral range. This UV optical filter can be built using post-processing after integrated-circuit and UV photodiode fabrication in a bipolar or CMOS technology. The dielectric multi-layer stack can be deposited on top of the UV photodiode after the standard technology process has been completed. The number of layers was optimized for 11 with all layers of a thickness acceptable for reproducible fabrication. The materials used for fabricating the UV filter are silicon compatible. Applications presented are in DNA solutions (to measure the optical density of these solutions at 260 nm) and in the detection of a gas flame in the presence of ambient light based on the different emission spectra in the UV.

show abstract

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

UV Bandpass Optical Filter for Microspectometers

2007

View full text Add to dashboard Cite

show abstract

“…The simplest realization of the Fabry-Perot-based microspectrometer uses bulk micromachining on two wafers with subsequent wafer-to-wafer bonding [29][30][31][32][33][34][35]. Figure 11 shows the basic device structure.…”

Section: Interferometer Type Of Microspectrometersmentioning

confidence: 99%

MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range

Wolffenbuttel

2005

J. Micromech. Microeng.

173

110

View full text Add to dashboard Cite

Miniaturized free-field based optical microspectrometers have huge potential for application in industry, science, medicine, agriculture and biology. State-of-the-art is the micro-assembly of micromachined optical components on a mini-bench and the trend is towards fully integrated optical microsystems. Complete silicon IC compatible MEMS-based opto-electrical microsystems on a single chip may offer huge cost benefits in these potentially high-volume applications. On-chip integration does, however, impose limitations. The required process compatibility and limited choice of acceptable materials does not necessarily give optimum optical performance. Also, the dimensional downscaling is not generally an optical advantage. This overview discusses grating-based and interferometer-based mini-and microspectrometers, shows performances already reported, the trends, the potential, the limitations and approaches to obtain a sufficient optical performance, in terms of spectral resolution and throughput, for serving the majority of applications.

show abstract

“…As a result, a multi-gas measurement system is needed to meet the requirements for high absorption resolution, species selectivity, and band sensitivity from the near-infrared (NIR) to the mid-infrared (MIR) ranges. Consequently, many different types of Fabry-Perot interferometer (FPI)-based gas sensors and sensor systems have been developed [1][2][3][4][5]. Makoto et al have reported upon an electro-statically driven tunable FP filter with a wide wavelength range for more precise selective gas sensing [4].…”

Section: Introductionmentioning

confidence: 99%

A Multi-Channel Gas Sensor Using Fabry-Perot Interferometer-Based Infrared Spectrometer

Choi¹,

Lee²,

Kong³

2012

Journal of Sensor Science and Technology

View full text Add to dashboard Cite

This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License(http://creativecommons.org/licenses/bync/3.0)which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.Journal of Sensor Science and Technology Vol. 21, No. 6 (2012) AbstractWe report a Fabry-Perot interferometer (FPI)-based multi-channel micro-spectrometer used for multi-gas measurement in the spectral range of 3-5 Ïm and its gas sensing performance. The fabricated infrared (IR) spectrometer consists of two parts: an FPI on the top side for selective IR filtering and a V 2 O 5 -based IR detector array on the bottom side for the detection of the filtered IR. Experimental results show that the FPI-based multi-channel gas sensor has reliability and selectivity for simultaneously detecting environmentally harmful gases such as CH 4 , CO 2 , N 2 O and CO in the spectral range of 3-5 Ïm. The fabricated FPI-based multi-channel gas sensor also demonstrated that a reliable and selective detection of gas concentrations ranging from 0 to 500 ppm is feasible. In addition, the electrical characteristics demonstrate a superior response performance in regards to the selectivity in the multi-target gases.

show abstract

Surface micromachined Fabry-Perot tunable filter

Cited by 92 publications

References 6 publications

UV Bandpass Optical Filter for Microspectometers

UV Bandpass Optical Filter for Microspectometers

MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range

A Multi-Channel Gas Sensor Using Fabry-Perot Interferometer-Based Infrared Spectrometer

Contact Info

Product

Resources

About