2005
DOI: 10.1524/zkri.2005.220.9-10.841
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Surface acoustic wave band gaps in micro-machined air/silicon phononic structures — theoretical calculation and experiment

Abstract: Abstract. In this paper, we investigate the band gaps of micro-machined air/silicon phononic structures both theoretically and experimentally. Based on the plane wave expansion method, dispersion relations of the surface and bulk modes with square lattices in air/silicon two-dimensional phononic structures are calculated and discussed. Band gap widths due to the filling fraction and temperature variation are also analyzed. On the experimental side, generation and reception of high frequency surface acoustic wa… Show more

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Cited by 20 publications
(5 citation statements)
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“…For an air/Si PC with square lattice, propagation of SAWs was analyzed in previous studies [56,41]. With a filling fraction F D 0.283, there is a partial band gap for SAW along the X direction [56].…”
Section: Reflective Grating For Saws Using Phononic Crystalsmentioning
confidence: 99%
See 1 more Smart Citation
“…For an air/Si PC with square lattice, propagation of SAWs was analyzed in previous studies [56,41]. With a filling fraction F D 0.283, there is a partial band gap for SAW along the X direction [56].…”
Section: Reflective Grating For Saws Using Phononic Crystalsmentioning
confidence: 99%
“…For an air/Si PC with square lattice, propagation of SAWs was analyzed in previous studies [56,41]. With a filling fraction F D 0.283, there is a partial band gap for SAW along the X direction [56]. Further, the band gap enlarges with the increase of filling fraction, and reaches the widest gap for the case of F D 0.48 [41].…”
Section: Reflective Grating For Saws Using Phononic Crystalsmentioning
confidence: 99%
“…If S fs vanishes, no coupling effect will exist between the solid and fluid. For the present acoustic fluid-solid interaction problem under the conditions (6)-(9), a key step is to obtain the finite element formulation for one unit cell by imposing (6) and (7) to (10). 35,36 To describe the derivation process explicitly without loss of generality, we consider a fluid-solid system consisting of N identical substructures (i.e.…”
Section: Finite Element Formulationmentioning
confidence: 99%
“…At present, a certain degree of interests is being generated on the PCs with periodic holes (vacuum [6] or filled with air [7]) with their bandgaps mainly determined by the geometric parameters. Most of the reports are focused on the systems with convex holes (circular or regular polygon holes) [3][4][5][6][7]. In a recent paper [8], we proposed a kind of PCs with the cross-like (a kind of non-convex) holes.…”
Section: Motivation and Backgroundmentioning
confidence: 99%