2016
DOI: 10.1063/1.4942752
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Super-resolution ultrasonic imaging of stiffness variations on a microscale active metasurface

Abstract: Surface acoustic waves propagating over an immersed membrane metasurface, such as an array of capacitive micromachined ultrasonic transducers, can be leveraged to achieve subwavelength focusing and imaging. This is demonstrated numerically and experimentally utilizing a time reversal method on a 2D membrane array at MHz frequencies. The focusing region is a dense metasurface of CMUT membranes with 6.5 MHz resonance frequency that supports a wave field that is evanescent normal to the metasurface and capable of… Show more

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Cited by 7 publications
(6 citation statements)
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“…Finally, as we initially proved [25], it also enhances the intensity deposited onto one location, because of the subwavelength dimensions of the focal spots. This entails that our approach can be utilized for subwavelength-sized actuators and micro-electromechanical systems as proved recently by Lani et al [57].…”
Section: Subwavelength Focusing From the Far Fieldmentioning
confidence: 99%
“…Finally, as we initially proved [25], it also enhances the intensity deposited onto one location, because of the subwavelength dimensions of the focal spots. This entails that our approach can be utilized for subwavelength-sized actuators and micro-electromechanical systems as proved recently by Lani et al [57].…”
Section: Subwavelength Focusing From the Far Fieldmentioning
confidence: 99%
“…An and Sohn 42 demonstrated experimentally that surface cracks can be detected by measuring displacement enhancement near cracks due to the generation of evanescent waves. Recently, in electromagnetic and ultrasonic studies, the characteristics of evanescent waves have been applied to superresolution imaging 43,44 in which the resolution of an image exceeds the limitation of the wavelength.…”
Section: 31mentioning
confidence: 99%
“…Elastic waves are generated in a solid medium by a laser through one of two mechanisms: ablation or the thermoelastic effect. [42][43][44][45][46][47][48][49][50][51][52][53] For large pulse energy, a sudden laser energy input induces plasma emission from the surface of a material, and a normal force is instantaneously loaded as a reaction force of the plasma emission. 45,50 For small laser pulse energy, below the ablation regime, sudden thermal expansion of the surface of a material generates elastic waves.…”
Section: Relationship Between Source Position and Energy Generatedmentioning
confidence: 99%
“…AMS can also achieve super-resolution imaging effects on sound waves [ 161 ]. A low-density single-phase hyperlens with a star-shaped lattice structure made of steel has double-negative parameter properties.…”
Section: Progress In Acoustic Metasurface Researchmentioning
confidence: 99%