2006
DOI: 10.1016/j.mseb.2006.03.036
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Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering

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Cited by 57 publications
(20 citation statements)
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“…It has been employed by numerous authors to identify the friction coefficients in both metal and wood cutting processes [34][35][36][37]. Other industrial or semi-industrial (full scale) tests, such as turning tests [38,39] and cutting tests [37,[40][41][42] are conducted as complementary and comparative tests to the pin/ball-on-disk (laboratory scale) tests.…”
Section: Tribologymentioning
confidence: 99%
“…It has been employed by numerous authors to identify the friction coefficients in both metal and wood cutting processes [34][35][36][37]. Other industrial or semi-industrial (full scale) tests, such as turning tests [38,39] and cutting tests [37,[40][41][42] are conducted as complementary and comparative tests to the pin/ball-on-disk (laboratory scale) tests.…”
Section: Tribologymentioning
confidence: 99%
“…The enhancement of the coating hardness could be caused by the grain refinement effect with increasing bias voltage [48]. Chu et al [49] found that the residual stress was clearly related to the negative bias voltages, and high hardness is a result of such high residual stress. The compressive stress arises because of a process called "atomic peening", in which some atoms squeeze into the lattices directly, causing internal stress and increasing the coating hardness [24,50].…”
Section: Mechanical Propertiesmentioning
confidence: 99%
“…The hydrogen solubility in thin films or coatings often exceeds the value for bulk systems, which is attributed to preferred hydrogen trapping at open volume defects (dislocations, grain boundaries, surfaces, and vacancies) [53]. With increasing hydrogen concentration inside the coating, the compressive stresses usually increase due to hydrogen incorporation into the open volume defects Chu et al [49] found that the residual stress was clearly related to the negative bias voltages, and high hardness is a result of such high residual stress. The compressive stress arises because of a process called "atomic peening", in which some atoms squeeze into the lattices directly, causing internal stress and increasing the coating hardness [24,50].…”
Section: Mechanical Propertiesmentioning
confidence: 99%
“…The influence of the process parameters on the microstructure and mechanical properties of the Ti Si N coatings in a certain method has been extensively investigated. This includes bias voltage, which significantly influences the atom mobility on the coating surface and ion bombardment [10][11][12][13]. As an effective method, cathodic arc assisted magnetron sputtering has been used for deposition of various hard protective coatings because it overcame the shortcomings of pure magnetron sputtering, such as low ionization of the reactants during deposition and poor adhesion of the resulted films [14][15][16][17][18].…”
Section: Introductionmentioning
confidence: 99%