2009
DOI: 10.4028/www.scientific.net/kem.407-408.388
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Mutsumi Touge, Takayuki Nakano, Keishi Yamaguchi, Akihisa Kubota, Junji Watanabe

Abstract: Polycrystalline diamond (PCD) has been widely used for various cutting tools and die components making use of its hardness and wear resistance properties. The polishing method of a single crystal diamond substrate and SiC using ultraviolet irradiation was newly developed to obtain mirror-finished surfaces. Due to the long polishing time in this method, a better pre-machined surface is required to shorten the total processing time. In this work, the constant-pressure grinding was performed using a cup type meta…

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