2022 China Semiconductor Technology International Conference (CSTIC) 2022
DOI: 10.1109/cstic55103.2022.9856791
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Study on Performance of Si3N4 Enhanced Microbolometer with Salicided Polysilicon Thermistor in CMOS Technology

Haolan Ma
1
,
Yaozu Guo
2
,
Ke Wang
3
et al.
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