2015
DOI: 10.1016/j.surfcoat.2015.05.008
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Study of magnetic iron nitride thin films deposited by high power impulse magnetron sputtering

Abstract: In this work, we studied phase formation, structural and magnetic properties of iron-nitride (Fe-N) thin films deposited using high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (dc-MS). The nitrogen partial pressure during deposition was systematically varied both in HiPIMS and dc-MS. Resulting Fe-N films were characterized for their microstructure, magnetic properties and nitrogen concentration. We found that HiPIMS deposited Fe-N films show a globular nanocrystalline mi… Show more

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Cited by 35 publications
(11 citation statements)
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“…2 However, in a plasma based synthesis method, typically that are found in physical vapor deposition, increased ratio of nitrogen ions may assist the formation of some phases that do not exist in the bulk. Iron mononitride (FeN) is one such compound, which has been deposited frequently using reactive magnetron sputtering [3][4][5][6][7][8][9][10] and recently using nitrogen plasma assisted molecular beam epitaxy. 11 Theoretical studies suggest that the enthalpy of formation (∆H • f ) for FeN 12 is about -45 kJ mol −1 which is considerably higher (less negative) than that of early TM mononitrides e.g.…”
Section: Introductionmentioning
confidence: 99%
“…2 However, in a plasma based synthesis method, typically that are found in physical vapor deposition, increased ratio of nitrogen ions may assist the formation of some phases that do not exist in the bulk. Iron mononitride (FeN) is one such compound, which has been deposited frequently using reactive magnetron sputtering [3][4][5][6][7][8][9][10] and recently using nitrogen plasma assisted molecular beam epitaxy. 11 Theoretical studies suggest that the enthalpy of formation (∆H • f ) for FeN 12 is about -45 kJ mol −1 which is considerably higher (less negative) than that of early TM mononitrides e.g.…”
Section: Introductionmentioning
confidence: 99%
“…FeN compounds were extensively studied by Schaff et al [23][24][25][26] in late 1990s. Subsequently, FeN thin films were synthesized using ion beam sputtering [27], dc/rf magnetron sputtering [28][29][30][31][32][33][34][35][36][37][38], pulsed laser deposition (PLD) [39][40][41][42], high power impulse magnetron sputtering [43], nitrogen plasma assisted molecular beam epitaxy (MBE) [44][45][46][47][48] and very recently under HPHT [12,16,[49][50][51]. From applications points of view, the mononitride FeN is also very interesting as its oxidation resistance makes it a effective catalyst in chemical reactions [52,53], it can be used as a precursor to yield magnetic phases in a controlled way [38,44,54,55] and also in biomedical applications [17].…”
Section: Introductionmentioning
confidence: 99%
“…TiN and CrN are commonly used and well-studied hard coating materials [31,[35][36][37]. Fe-nitrides are less commonly used as hard coatings, although a limited number of studies have been conducted to examine their synthesis and mechanical properties [38][39][40]. Although films of nickel nitrides have been synthesized and studied [41,42], Ni has little affinity for nitrogen and as a poor nitride former, has limited commercial potential.…”
Section: Discussionmentioning
confidence: 99%