Abstract:Piezoresistive micro-mechanical acceleration sensor is one of the earliest developed silicon micro-mechanical acceleration sensors in MEMS. Its cantilever beam is the main component. So the structure optimization design of the cantilever beam becomes the key. During the process of the former structure optimization of the cantilever beam, the working way between the program of FEM analysis and the optimizes belong to a kind of series connection ,so we must design interface program in order to realize the data t… Show more
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