2014
DOI: 10.4236/jsemat.2014.42014
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Structural Characteristics of Porous Silicon

Abstract: Silicon wafers (p-type) were etched under continuous flow of HF vapors in a reaction chamber at standard temperature and pressure. Etched surface of the silicon wafer was found emitting red luminescence when exposed to ultra violet (UV) light. XRD and Atomic Force Microscopy of the etched samples were carried out to study the surface of the etched silicon. It is noticed that etching has removed the stress induced atomic layers of silicon at grain boundaries and layer of porous silicon has been formed at the su… Show more

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Cited by 4 publications
(3 citation statements)
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“…Figure 3b reveals the broad diffraction peaks which implies the formation of a macro-porous layer with a small broadening peak near 32.925°and the splitting of the peak of the porous silicon layer. The mPS crystallographic orientation belongs to the (211) orientation at 2θ = 33.3°, 45,46 and this indicates that the crystalline nature of the silicon pores, while the peaks at 69.2°in crystal position of (422) correspond to the bare crystalline silicon (c-Si) substrate remaining amongst the pores. 47 Figure 3c reveals the peaks of ZnO/mPS structures and it shows considerably small appearance of mPS peaks at (211) as the nanostructures adsorbed onto mPS and not-fully covered the pores surface.…”
Section: Resultsmentioning
confidence: 99%
“…Figure 3b reveals the broad diffraction peaks which implies the formation of a macro-porous layer with a small broadening peak near 32.925°and the splitting of the peak of the porous silicon layer. The mPS crystallographic orientation belongs to the (211) orientation at 2θ = 33.3°, 45,46 and this indicates that the crystalline nature of the silicon pores, while the peaks at 69.2°in crystal position of (422) correspond to the bare crystalline silicon (c-Si) substrate remaining amongst the pores. 47 Figure 3c reveals the peaks of ZnO/mPS structures and it shows considerably small appearance of mPS peaks at (211) as the nanostructures adsorbed onto mPS and not-fully covered the pores surface.…”
Section: Resultsmentioning
confidence: 99%
“…7 (d) SiO 2 substrate XRD pattern, the main peak at 69.15° belongs to (100) planes of Si. And the other lower intensity peaks are associated with the silicon oxide species [ 38 ]. Besides, the reflection peak at 33° of pristine SiO 2 substrate in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…XRD pattern, Figure (1) for etched sample shows diffraction style of PS substance manufactured at anodizing current density of 15 mA/cm 2 at 10 min anodizing times. The reflections XRD beam from (100) planes appear two peaks: the first high intensity peak at 2θ = 68.95° from crystal silicon (100) planes, and the second weak intensity peak at 2θ = 69.15° Web Site: https://jutq.utq.edu.iq/index.php/main Email: journal@jutq.utq.edu.iq from PS [17]. The peak in the crystal silicon spectrum is more intense than in the PS spectrum, indicating that the structure crystal silicon contains a crystalline phase [18].…”
Section: Structural Propertiesmentioning
confidence: 99%