Superlattices and Microstructures volume 39, issue 1-4, P366-375 2006 DOI: 10.1016/j.spmi.2005.08.073 View full text
M. Benetti, D. Cannatá, F. Di Pietrantonio, E. Verona, P. Verardi, N. Scarisoreanu, D. Matei, G. Dinescu, A. Moldovan, M. Dinescu

Abstract: Zinc oxide thin films were obtained on Pt-coated silicon, r-cut sapphire and MgO substrates by laser ablation of a Zn target in oxygen reactive atmosphere, the oxygen being supplied either by a standard gas inlet valve or from a radiofrequency (RF) oxygen plasma. The influence of the deposition parameters, i.e., laser wavelength (266 nm, 355 nm, 1064 nm), laser fluence (1.5-20 J/cm 2 ), oxygen pressure (1-60 Pa), and of RF plasma beam addition on the morphological properties of zinc oxide films was particular…

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