Structural and photoluminescent properties of ZnO films deposited by radio frequency reactive sputtering

Abstract

Zinc oxide films with c-axis preferred orientation were deposited on silicon (100) substrates by radio frequency (RF) reactive sputtering. The properties of the samples were characterized by X-ray diffractometer, X-ray photoelectron spectroscopy and fluorescent-spectrophotometer. The effect of sputtering power and substrate temperature on the structural and photoluminescent (PL) properties of the ZnO films was investigated. The results indicated that when the sputtering power is 100 W and the substrate temperature is 300-400℃, it is suitable for the growth of high c-axis orientation and small strain ZnO films. A violet peak at about 380 nm and a blue band at about 430 nm were observed in the room temperature photoluminescence spectra, and the origin of blue emission was investigated.ZnO films, XRD spectra, PL spectra, substrate temperature, RF reactive sputtering ZnO has been widely used in the surface-acoustic apparatus, gas sensor, solar cell electrode and light emitters for its excellent optical and electronic properties [1] . As a kind of direct band semiconductor compound with hexagonal wurtzite structure, ZnO has a wide band gap E g (3.37 ev) and high excition binding energy ex b E (60 meV) at room temperature, compared with other wide band emission materials [2,3] such as ZnSe (E g = 2.7 eV, ex b E = 20 meV) and GaN (E g = 3.4 eV, ex b E = 21 meV), and it would be more suitable for the room temperature or high temperature ultra-violet emission material, so its emission properties have drawn much attention.The emission peaks of ZnO films mainly contain an excition peak (∼380 nm) [2][3][4][5][6][7] and a green peak (∼510 nm) [6,7] . With the further study of the ZnO films photoluminescent (PL) properties, blue peaks at various wavelengths have been reported, e.g. Wang et al. [8] reported the blue peak at 446

Mesosynthesis of ZnO–SiO2porous nanocomposites with low-defect ZnO nanometric domains

“…In fact, a significant disagreement between the experimental and fitted spectra occurs when only two components (corresponding to SiO 2 and ZnO) are included. In fact, in many studies on the ZnO-SiO 2 composites, the adjustment of the O 1s XPS spectra is performed with three components [39,40]. The calculated binding energies of the three components are respectively 533.0, 532. values ( 532 eV).…”

“…The calculated binding energies of the three components are respectively 533.0, 532. values ( 532 eV). These high values are usually attributed to the presence of OH − groups integrated in the material and to loosely bound oxygen on the surface such as H 2 O [37,40]. The displacement of the medium component towards high binding energy values and the absence of other significant components around 531 eV suggest the existence of a low proportion of oxygen deficient regions within the matrix of ZnO [41].…”

High quality p-type ZnO film growth by a simple method and its properties

“…When the substrate temperature was lower, this kind of poly group attached to the substrate surface would be oxidized by NO 2 , and then the structure of former poly(Zn-O) n group would be destructed to get single Zn-O. This is similar to the theory in many reports [8,9] using sputtering or pulsed laser to deposit ZnO films with (002) preferential orientation and is different from the general CVD method. For the general CVD method, the poly group is directly deposited on the substrate, and then decomposed to obtain ZnO films, so the films usually exhibit (100), (101) and (110) orientations [10,11] .…”

Tri-doped co-annealed zinc oxide semi-conductor synthesis and characterization: photodegradation of dyes and gas sensing applications

“…Different types of morphologies such as nanotubes, nanowires, Nano belts, Nano sheets, Nano flowers, Nano rods has been synthesized by various physical and chemical routes such as sol gel with spin and dip coating [16,17]. Spray pyrolysis, hydrothermal method, Rf magnetron sputtering and simple combustion method [18][19][20][21]. Among these techniques, simple combustion method and thermal evaporation technique have more advantageous than others because of their low cost, simplicity in process control, suitable for preparing nanostructure metal oxides.…”