2008
DOI: 10.1116/1.2819255
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Structural and electrical investigation of laser annealed (Pb,Sr)TiO3 thin films

Abstract: Material and electrical characteristics of (Pb,Sr)TiO3 (PSrT) films irradiated by various laser pulses and laser fluences are investigated in this work. Enhanced crystallinity can be obtained after excimer laser annealing (ELA). However, grain growth induced by ELA is nonuniform, and the effect is limited to the upper region of the films. As the number of laser pulses increases to 120, the film shows stronger diffraction intensities and increased oxygen content, resulting in a distinct capacitance versus elect… Show more

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Cited by 4 publications
(1 citation statement)
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“…Excimer laser annealing (ELA) is a promising technique to selectively crystallize ferroelectric oxide thin films (Chart , solid diamond symbol) as well as other functional metal oxide thin films. , In particular, the UV excimer laser is suitable for the selective annealing of the ferroelectric oxide materials as they usually have optical bandgaps of 2.5–4 eV and absorb UV light in the near-surface region. Owing to the extremely high energy and short pulse width of the excimer laser, the absorbed light energy generates a highly energetic heat flow from the surface into the thin film interior without inducing thermal damage in the polymer substrate.…”
Section: Introductionmentioning
confidence: 99%
“…Excimer laser annealing (ELA) is a promising technique to selectively crystallize ferroelectric oxide thin films (Chart , solid diamond symbol) as well as other functional metal oxide thin films. , In particular, the UV excimer laser is suitable for the selective annealing of the ferroelectric oxide materials as they usually have optical bandgaps of 2.5–4 eV and absorb UV light in the near-surface region. Owing to the extremely high energy and short pulse width of the excimer laser, the absorbed light energy generates a highly energetic heat flow from the surface into the thin film interior without inducing thermal damage in the polymer substrate.…”
Section: Introductionmentioning
confidence: 99%