Statistical Analysis of Measurement Processes Using Multi-Physic Instruments: Insights from Stitched Maps
Clement Moreau,
Julie Lemesle,
David Páez Margarit
et al.
Abstract:Stitching methods allow one to measure a wider surface without the loss of resolution. The observation of small details with a better topographical representation is thus possible. However, it is not excluded that stitching methods generate some errors or aberrations on topography reconstruction. A device including confocal microscopy (CM), focus variation (FV), and coherence scanning interferometry (CSI) instrument modes was used to chronologically follow the drifts and the repositioning errors on stitching t… Show more
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