Stationary distribution of mobile charge in the dielectric of MOS structures

Abstract

From a joint solution of both the Poisson equation and the equation of the current density analytical expressions are derived for the mobile ion density distribution, the potential and intensity of a field in a dielectric of MOS structures as a function of the applied voltage. The expression for charge distribution is used to determine the theoretical dependence between the equivalent surface charge and the voltage across the dielectric.

Stationary distribution of mobile ions in a dielectric with regard to their elastic interaction with the medium

“…Substituting ( 5 ) , (7), and (9) in (4), we have after simple transformations It is taken into account in (10) that in this case…”

“…(6 : experimental data of [4]) : (1) calculated according to (19) with 0: = 2 x 10-38 Jcm3; (2) calculated according to [7] Fig. 4 also shows the distribution of the ion concentration, which has been calculated in accordance with the theory [7], which does not take into account the influence of elastic concentration fields (curve 2 ) . As can be seen from this figure, the theory [7] gives in this case an unsatisfactory result.…”