Stability Measurement of Ion Beam Current from Argon Field Ion Source

Okawa, Ryuta; Morikawa, Yuuki; Nagai, Shigekazu; Iwata, Tatsuya; Kajiwara, Kazuo; Hata, Kenji

doi:10.1380/ejssnt.2011.371

Cited by 4 publications

(3 citation statements)

References 10 publications

(14 reference statements)

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“…Krypton is thought to be a candidate for GFIS nanofabrication; nevertheless, the characteristics of krypton ion emission from a GFIS have not been reported although hydrogen, helium, neon, argon, nitrogen, and oxygen ion emissions have been reported 30,[37][38][39] from GFIS with an SAT. We investigated the characteristics of krypton ion emission using our field ion microscope.…”

Section: Introductionmentioning

confidence: 99%

Characteristics of krypton ion emission from a gas field ionization source with a single atom tip

Shichi¹,

Matsubara²,

Hashizume³

2017

Jpn. J. Appl. Phys.

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A scanning ion beam instrument equipped with a gas field ionization source (GFIS) has been commercialized, but only helium and neon are currently available as GFISs. The characteristics of krypton ion emission from a single atom tip (SAT) have not been reported yet. In this study, the characteristics of krypton ion emission were investigated by field ion microscopy. At 65 K, the krypton ion emission current reached approximately 40 pA, which is 1 order of magnitude higher than that at 130 K. As the krypton gas pressure was increased, the krypton ion current increased. At a pressure of 0.3 Pa, the emission current was anticipated to reach 200 pA, which may be high enough for nanofabrication. The variation of the krypton ion current was as low as 5% in one hour. We concluded that a krypton ion beam instrument equipped with a GFIS will be a powerful tool for nanofabrication.

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Section: Introductionmentioning

confidence: 99%

Characteristics of krypton ion emission from a gas field ionization source with a single atom tip

Shichi¹,

Matsubara²,

Hashizume³

2017

Jpn. J. Appl. Phys.

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“…4(a) was due to a migration of the top most atom. 17) Stability of the Ne GFIS defined with the ratio of the standard deviation of the fluctuation and the average ion current was to be 3.8% for duration of initial 500 s. The long-term drift of the ion current for the Ar GFIS [Fig. 4(b)] was due to decrease in the ambient pressure during the experiment.…”

mentioning

confidence: 98%

“…This tip was mounted in the experimental system, cleaned by field evaporation and imaged with He as imaging gas, and then heated under an electric field to produce an atomic scale protrusion on a (111) plane by FEM mode. [16][17][18][19] With careful field evaporation procedure, one to three atom(s) terminated tungsten emitter could be obtained. Tip temperature was set to 40 K for the Ne GFIS and 90 K for the Ar GFIS.…”

mentioning

confidence: 99%

Investigation of stability and charge state of Ne and Ar gas field ion source by time-of-flight mass spectrometry

Nagai¹,

Iwata²,

Okawa³

et al. 2014

Jpn. J. Appl. Phys.

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Charge state distribution of the working gases of the Ar and Ne gas field ion source (GFIS) were investigated by the time-of-flight mass spectrometry using a newly designed experimental system. GIFS emitters having few atoms on the top of the (111) surface of tungsten were formed by a remolding and field evaporation sequence with electrochemically etched h111i oriented tip. At a probe current of about 1 pA, the ratio of standard deviation of fluctuation and average ion current <2.5% was recorded from a single atom terminated emitter of the Ar GFIS. Mass analysis by the time-of-flight spectrometer showed that there were only singly charged ions both of the Ne and Ar GFIS. Furthermore, no impurity gas ion was detected in the mass spectrum.

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Spin-polarized quantum confinement in nanostructures: Scanning tunneling microscopy

et al. 2014

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Experimental investigations of spin-polarized electron confinement in nanostructures by scanning tunneling microscopy (STM) and scanning tunneling spectroscopy (STS) are reviewed. To appreciate the experimental results on the electronic level, the physical basis of STM is elucidated with special emphasis on the correlation between differential conductance, as measured by STS, and the electron density of states, which is accessible in ab initio theory. Experimental procedures which allow one to extract the electron dispersion relation from energy-dependent and spatially resolved STM and STS studies of electron confinement are reviewed. The role of spin polarization in electron confinement is highlighted by both experimental and theoretical insights, which indicate variation of the spin polarization in sign and magnitude on the nanometer scale. This review provides compelling evidence for the necessity to include spatial-dependent spin-resolved electronic properties for an in-depth understanding and quantitative assessment of electron confinement in magnetic nanostructures and interaction between magnetic adatoms.

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Stability Measurement of Ion Beam Current from Argon Field Ion Source

Cited by 4 publications

References 10 publications

Characteristics of krypton ion emission from a gas field ionization source with a single atom tip

Characteristics of krypton ion emission from a gas field ionization source with a single atom tip

Investigation of stability and charge state of Ne and Ar gas field ion source by time-of-flight mass spectrometry

Spin-polarized quantum confinement in nanostructures: Scanning tunneling microscopy

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