Abstract-A model for process-induced parameter variations is proposed, combining die-to-die, within-die systematic, and withindie random variations. This model is put to use toward finding suitable timing margins and device file settings, to verify whether a circuit meets a desired timing yield. While this parameter model is cognizant of within-die correlations, it does not require specific variation models, layout information, or prior knowledge of intrachip covariance trends. The approach works with a "generic" critical path, leading to what is referred to as a "processspecific" statistical-timing-analysis technique that depends only on the process technology, transistor parameters, and circuit style. A key feature is that the variation model can be easily built from process data. The derived results are "full-chip," applicable with ease to circuits with millions of components. As such, this provides a way to do a statistical timing analysis without the need for detailed statistical analysis of every path in the design.Index Terms-Correlations, die-to-die variations, generic critical path, parametric yield, principal component analysis, statistical timing analysis, timing margin, virtual corner, within-die variations.