volume 33, issue 15, P980-988 1993
DOI: 10.1002/pen.760331507
View full text

Abstract: Experimental data confirm the utility of the following simple equation in predicting the spin coating behavior of polyimide precursor solutions: in which c PI h k t =time, and: w h = CPokP1wP2tP3 (1) = polymer solution solids weight fraction: = fitted coefficient (Greek letter beta); = film thickness after cure or solvent removal: = polymer solution kinematic viscosity, centistokes; = wafer spin speed, rpm (Greek letter omega). SPIN SPEED WAFER < VISCOUS DRAG > CENTRIFUGAL FORCE I POLYMER ! SOLUTION WAFER h =…

expand abstract