1987
DOI: 10.1063/1.98038
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Space-charge-limited current in thin-film diamond

Abstract: The electrical conduction in thin-film diamond synthesized by microwave plasma enhanced chemical vapor deposition has been studied with metal-diamond-silicon metal-insulator-semiconductor structures. Measurements over a wide temperature range provide evidence for space-charge-limited current in the presence of traps. An exponential distribution of traps with a peak value of the order of 3×1020 cm−3 eV−1 has been deduced from the current-voltage-temperature data.

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Cited by 43 publications
(10 citation statements)
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“…15,16 The observation of these phenomena implies carrier injection into undoped diamond. If the source of carriers for field emission in diamond is due to electrons injected from the electrical contact into the conduction band, then band bending is an alternate explanation of the results for nitrogen in Fig.…”
mentioning
confidence: 98%
“…15,16 The observation of these phenomena implies carrier injection into undoped diamond. If the source of carriers for field emission in diamond is due to electrons injected from the electrical contact into the conduction band, then band bending is an alternate explanation of the results for nitrogen in Fig.…”
mentioning
confidence: 98%
“…In addition, the J-E characteristics exhibit nearly symmetrical and obey a power law relationship over several decades of current, strongly suggestive of spacecharge-limited current ͑SCLC͒ in the presence of distributed traps. 17,18 This is especially possible for the EB-cured nanoporous film, due to electron-beam irradiation into a relatively loose bonding network of porous silicate. As considering SCLC conduction, the current density can be expressed as the following equation: 19 FIG.…”
mentioning
confidence: 99%
“…For example, the resistivity of natural insulating diamond is typically greater than 1015 ohm-cm, and values as high as 1013 ohm-cm have been achieved in CVD films (1 1). Being able to produce CVD films with high resistivity is promising, but resistivitv alone does not determine whether a material is suitable for electronic applications because the resistivity can depend on carrier concentration, carrier mobility, and space charge (12). Traditional characterization uses the Hall effect to determine both the mobility and the concentration of the carriers, but in undoped, insulating materials this measurement is difficult because of the low intrinsic carrier concentration (13).…”
Section: Electrical Transport Properties Of Undoped Cvd Diamond Filmsmentioning
confidence: 99%