Solvent‐Vapor‐Induced Tunability of Self‐Assembled Block Copolymer Patterns

Jung, Yeon Sik; Ross, Caroline A.

doi:10.1002/adma.200802855

Cited by 247 publications

(372 citation statements)

References 40 publications

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“…Moreover, the directions of the self-assembled hcp lattices were in agreement with those of the templates (not shown). From these results, we confirmed that PMMA 25 -b-PMAPOSS 13 thin films were self-assembled so that the lattice points of underlying templates were interpolated by the PMMA spherical microdomains and thus their densities were multiplied by a factor of 4 for both solvent compositions. Figures 5 (c) and (d) demonstrate the results with d S = 39 nm ≈ 3d 0 , namely nine times density multiplication.…”

supporting

confidence: 63%

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Directed Self-assembly with Density Mmultiplication of Cage Silsesquioxane-containing Bblock Copolymer via Controlled Solvent Annealing

Yoshida

Tada

Ishida

et al. 2011

J. Photopol. Sci. Technol.

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supporting

confidence: 63%

“…Figure 5 shows the SEM images and their 2D-FFT images of the PMMA 25 -b-PMAPOSS 13 thin films solvent-annealed on the chemically pre-patterned templates. The lattice constants of the underlying templates were d S = 26 nm = 2d 0 for (a) and (b), while d S = 39 nm = 3d 0 for (c) and (d).…”

mentioning

confidence: 99%

Directed Self-assembly with Density Mmultiplication of Cage Silsesquioxane-containing Bblock Copolymer via Controlled Solvent Annealing

Yoshida

Tada

Ishida

et al. 2011

J. Photopol. Sci. Technol.

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“…Closed packed sphere structures have yet to be demonstrated experimentally and other phases beyond those identified by SCMF theory have been reported, e.g. perforated lamellae [41], as shown in figure 2(b). Frederickson & Bates provide additional reviews which cover topics on thermodynamics and kinetics aspects of block copolymer films [42].…”

Section: Block Copolymer (Bcp) Thin Filmsmentioning

confidence: 99%

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Farrell

Petkov²,

Morris

et al. 2010

Journal of Colloid and Interface Science

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Self-assembled nanoscale porous architectures, such as mesoporous silica films (MPS), block copolymer films (BCP) and porous anodic aluminas (PAAs), are ideal hosts for templating one dimension (1 D) nano-entities for a wide range of electronic, photonic, magnetic and environmental applications. All three templates offer dimensional scalability and tunability over a wide range, with critical pore sizes for each system well below the 20 nm threshold [1][2][3]. Recently, research has progressed towards controlling the pore direction, orientation and long range order of these nanostructures through so called directed self-assembly (DSA). Significantly, the introduction of a wide range of top-down chemically and physically pre-patterning substrates has facilitated the DSA of nanostructures into functional device arrays. The following review begins with an overview of the fundamental aspects of self-assembly and ordering processes during the formation of PAAs, BCPs and MPS films. Special attention is given to the different ways of directing self-assembly, concentrating on properties such as uni-directional alignment, precision placement and registry of the self-assembled structures to hierarchal or top down architectures. Finally, to distinguish this review from other articles we focus on research where nanostructures have been utilised in part to fabricate arrays of functioning devices below the sub 50 nm threshold, by subtractive transfer and additive methods. Where possible, we attempt to compare and contrast the different templating approaches and highlight the strengths and/or limitations that will be important for their potential integration into downstream processes. ACCEPTED MANUSCRIPT 3 SECTION 1.0: SELF ASSEMBLY AND NANO-ARCHITETCURESThe diversity of self-assembled nanostructures and more importantly, their precise orientation within a thin film (fixed to a substrate) ultimately determines their function and overall application. A large population of research reports to date have focused on identifying these orientations and related periodicities, using x-ray and microscopy tools, as well the development of methods for readily manipulating nanostructures, such as pre-patterning of silicon substrates for the alignment of block copolymers (BCPs) [4] and mesoporous thin films (MTFs) [5] and altering the growth direction of porous anodic alumina (PAA) templates [6]. In this section, a brief synopsis of the mechanisms behind the self-assembly/organisation of each system and highlight nanoscale architectures (and orientations), which are important from a device perspective. Templated mesoporous thin filmsOrdered mesoporous powders were first discovered by researchers at the Mobil Petrochemical Corporation in 1992 and shortly after, sol-gel derived mesoporous silica films were fabricated [1,7].The first series of ordered mesoporous films were reported by Yang et al. in 1996 [8], prepared using initial surfactant concentrations above their critical micelle concentration (CMC). However the films prepared fil...

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“…Consequently, thin films of siliconcontaining BCPs tend to exhibit a parallel orientation with the silicon-containing layer appearing on the top surface exposed to the air. Some solutions proposed include the use of a top-coat and solvent annealing to control the interfacial affinities of the blocks [4,5]. However, the fact that this is a multi-step process which requires significant amounts of work to find the optimal conditions required for suitable orientation control poses a great challenge for actual industrial use.…”

Section: Introductionmentioning

confidence: 99%