MRS Proc. 2000 DOI: 10.1557/proc-624-53 View full text
Steven M. Coleman, Robert L. Parkhill, Robert M. Taylor, Edward T. Knobbe

Abstract: ABSTRACTThe use of sol–gel-derived 0–3 composite ceramics for low-temperature direct-write electronics applications was investigated. The 0–3 composite paste materials were prepared using selected metal alkoxides and commercial low- and high-κ' dielectric powders. The composite pastes were deposited onto alumina and polyimide substrates using conventional screening and micro-dispensing techniques. The deposited films were oven-dried at or below 200°C and thermally densified using a CO2 laser. The 0–3 composite…

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