2020
DOI: 10.1016/j.jallcom.2020.155352
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Single-step fabrication of single-junction c-Si nano-structured solar cells by optimization of plasma etching parameters

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Cited by 4 publications
(3 citation statements)
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“…[ 104 ] When fabricating c‐Si nano‐structured solar cells, one‐step process based on implementation of ICP discharge was necessary to synthesize simultaneously and anti‐reflection and n‐layer by etching the p‐type silicon wafers in argon‐hydrogen plasma with optimized parameters. [ 105 ] A roll‐to‐roll plasma sputtering system was employed to produce antireflective and self‐cleaning plasma‐polymerized fluorocarbon layer to be incorporated to perovskite solar cells. [ 106 ] Arrays of ZnO 1D nanostructures were fabricated in RF PECVD setup with a purpose to serve as an antireflective surface in c‐Si solar cells where the efficiency of 20% in photovoltaic conversion was reached.…”
Section: Architecturementioning
confidence: 99%
“…[ 104 ] When fabricating c‐Si nano‐structured solar cells, one‐step process based on implementation of ICP discharge was necessary to synthesize simultaneously and anti‐reflection and n‐layer by etching the p‐type silicon wafers in argon‐hydrogen plasma with optimized parameters. [ 105 ] A roll‐to‐roll plasma sputtering system was employed to produce antireflective and self‐cleaning plasma‐polymerized fluorocarbon layer to be incorporated to perovskite solar cells. [ 106 ] Arrays of ZnO 1D nanostructures were fabricated in RF PECVD setup with a purpose to serve as an antireflective surface in c‐Si solar cells where the efficiency of 20% in photovoltaic conversion was reached.…”
Section: Architecturementioning
confidence: 99%
“…13 Besides having regular optical absorption properties, these nanostructures provide significantly enhanced surface areas, facilitating improved solar energy consumption. 17,18 Furthermore, these subwavelength structures of vertically aligned SiNWs possess competent light-trapping characteristics via multiple light reflections along the nanowires' length, thereby reducing the reflection loss. 19,20 Accordingly, the vertically aligned SiNW array warrants an active photovoltaic material with an embedded self-generated antireflection layer.…”
Section: Introductionmentioning
confidence: 99%
“…Various single or multilayer antireflection coatings (ARCs) on the surface of conventional solar cells have been adopted in this context. , However, the fabrication of these ARCs requires various complex calculations on their graded refractive indices. Besides, ARCs sometimes limit the device’s ultimate performance via the lattice divergence with the host element. , In recent years, the scientific community has made significant efforts to develop Si one-dimensional (1D) nanostructured materials, e.g., nanowires, nanopillars, nanocones, nanotips, nanopyramids, etc., in various ways. Besides having regular optical absorption properties, these nanostructures provide significantly enhanced surface areas, facilitating improved solar energy consumption. , Furthermore, these subwavelength structures of vertically aligned SiNWs possess competent light-trapping characteristics via multiple light reflections along the nanowires’ length, thereby reducing the reflection loss. , Accordingly, the vertically aligned SiNW array warrants an active photovoltaic material with an embedded self-generated antireflection layer.…”
Section: Introductionmentioning
confidence: 99%