2012
DOI: 10.1039/c2nr30258f
|View full text |Cite
|
Sign up to set email alerts
|

Simultaneous growth of self-patterned carbon nanotube forests with dual height scales

Abstract: In this study, we report on a unique, one-step fabrication technique enabling the simultaneous synthesis of vertically aligned multi-walled carbon nanotubes (VA-MWCNTs) with dual height scales through alcohol catalyzed chemical vapor deposition (ACCVD). Regions of VA-MWCNTs with different heights were well separated from each other leading to a self-patterning on the surface. We devised a unique layer-by-layer process for application of catalyst and inhibitor precursors on oxidized Si (100) surfaces before the… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
2
0

Year Published

2013
2013
2017
2017

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(2 citation statements)
references
References 35 publications
0
2
0
Order By: Relevance
“…This process leverages the influence of the catalyst-substrate interactions on the growth rate of CNTs 21 , creating strain gradients during synthesis that guide the CNTs into curved microscale geometries. Our method is analogous to the well-known use of thin-film stress to create curved and folded MEMS structures 22 .…”
mentioning
confidence: 99%
“…This process leverages the influence of the catalyst-substrate interactions on the growth rate of CNTs 21 , creating strain gradients during synthesis that guide the CNTs into curved microscale geometries. Our method is analogous to the well-known use of thin-film stress to create curved and folded MEMS structures 22 .…”
mentioning
confidence: 99%
“…Based on the one-step fabrication technique enabling the simultaneous synthesis of dual-height vertically aligned multi-walled carbon nanotubes proposed by Sam et al [16], and learning from the experience of de Volder et al [17], we show how dual-height vertically-aligned CNT scaffolds can be grown by chemical vapor deposition (CVD) in a one-step process by modifying the catalyst underlayer. Due to the different growth rates caused by the different catalyst underlayers, vertically aligned CNT scaffolds for the through-substrate-vias can be grown simultaneously with the much lower in height vertically aligned CNT scaffolds for the horizontal finwire interconnects in a one-step CVD process.…”
Section: Introductionmentioning
confidence: 99%