ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference 2013
DOI: 10.1109/asmc.2013.6552797
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Simulations of “atomistic” effects in nanoscale dopant profiling

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Cited by 6 publications
(5 citation statements)
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“…For this reason, next, we present a technique for the computation of sensitivity functions based on solving only one adjoint system of equations and performing a few matrix-vector multiplications. The technique presented below has been previously used for the analysis of variability and optimization of semiconductor devices (11)(12)(13)(14)(15)(16)(17) and has recently been applied by our group to solve inverse problems in dopant profiling (18,19). However, it should be noted that relatively similar approaches have been used before independently by the applied mathematics community to solve 1-D problems in fluid dynamics, climate, and heat transfer (20,21), and by the aerodynamic community to perform sensitivity analysis studies (22)(23)(24)(25).…”
Section: Numerical Computation Of the Sensitivity Function Of The Cel...mentioning
confidence: 99%
“…For this reason, next, we present a technique for the computation of sensitivity functions based on solving only one adjoint system of equations and performing a few matrix-vector multiplications. The technique presented below has been previously used for the analysis of variability and optimization of semiconductor devices (11)(12)(13)(14)(15)(16)(17) and has recently been applied by our group to solve inverse problems in dopant profiling (18,19). However, it should be noted that relatively similar approaches have been used before independently by the applied mathematics community to solve 1-D problems in fluid dynamics, climate, and heat transfer (20,21), and by the aerodynamic community to perform sensitivity analysis studies (22)(23)(24)(25).…”
Section: Numerical Computation Of the Sensitivity Function Of The Cel...mentioning
confidence: 99%
“…( ) [21] ( ) ( ) [22] where Pt m γ and V γ are the sensitivity functions of Pt m and V . Since the sensitivity function of Pt m is equal to 1 (in virtue of equations [3] and [5]), equations [20] and [22]…”
Section: Numerical Algorithm To Solve Problemmentioning
confidence: 99%
“…( ) Pt δµ r from [23] and inserting the result into eq. [21] allows us to compute λ as ( ) [25] Introducing the value of λ into [23] we find…”
Section: Computingmentioning
confidence: 99%
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“…For this reason, next, we present a technique for the computation of sensitivity functions based on solving only one adjoint system of equations and performing a few matrix-vector multiplications. The technique presented below has been originally developed for the analysis of variability and optimization of semiconductor devices (10)(11)(12)(13)(14)(15)(16) and has recently been applied by our group to solve inverse problems in dopant profiling (17,18). However, it should noted that relatively similar approaches have been used before independently by the applied mathematics community to solve 1-D problems in fluid dynamics, climate, and heat transfer (19,20), and by the aerodynamic community to perform sensitivity analysis studies (21)(22)(23)(24).…”
Section: Computation Of Catalyst Sensitivity Functionsmentioning
confidence: 99%