2009
DOI: 10.1117/12.829692
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Abstract: As the industry moves towards sub-65nm technology nodes, the mask inspection, with increased sensitivity and shrinking critical defect size, catches more and more nuisance and false defects. Increased defect counts pose great challenges in the post inspection defect classification and disposition: which defect is real defect, and among the real defects, which defect should be repaired and how to verify the post-repair defects.In this paper, we address the challenges in mask defect verification and disposition,… Show more

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Cited by 9 publications
(3 citation statements)
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“…The industry has developed several methods in the product development flow to proactively identify these hotspots, also known as weak points [7][8][9] . Despite all such design verification methods, we must still employ aggressive metrology methods to detect any deformation during fabrication [10,11] . AFM appears to be the only reliable metrology method for this purpose.…”
Section: X-tackingmentioning
confidence: 99%
“…The industry has developed several methods in the product development flow to proactively identify these hotspots, also known as weak points [7][8][9] . Despite all such design verification methods, we must still employ aggressive metrology methods to detect any deformation during fabrication [10,11] . AFM appears to be the only reliable metrology method for this purpose.…”
Section: X-tackingmentioning
confidence: 99%
“…Either type has transmitted and reflected type images and other detective defect information in text file. Through image comparison, polygon edge lines are detected and defects are identified by Anchor pattern centric image technology [5]. Based on correlation between defect and patterns, we can classify them into it corresponding defect types.…”
Section: Software Solutionmentioning
confidence: 99%
“…Image-to-layout technique is the major technology of this software solution, which can easily detect image signal and convert it to contour or layout as GDS or OASIS format for any other applications [5]. In contour edges, we have different algorithms to detect and allow user to place edges at different position based on design layers such as inner edge, outer edge or 50% threshold position.…”
Section: Kimmentioning
confidence: 99%