SIMS analysis with neutral cesium deposition: Negative secondary ion sensitivity increase and quantification aspects

A TRIDYN study: Comparison of experimental SIMS useful yields with simulated Cs concentration evolution

“…The simulation conditions are chosen identical to the experimental conditions used in the previous study [27]. Primary ion bombardment and neutral Cs deposition are simultaneously applied on different targets.…”

“…In such experimental conditions, the adjustment of the Cs surface concentration is decoupled from primary bombardment and the primary ion type can be chosen with respect to the application. A detailed study on the evolution of negative secondary ion sensitivities with respect to the Cs deposition conditions has been presented in a previous paper [27]. During this study, the Cs concentration could not be determined but only represented by a characteristic parameter.…”

“…Only laser SNMS shows similar detection limits than SIMS with Cs • deposition but quantification is problematic. This paper is meant to simulate the Cs surface concentration for the experimental conditions used in the aforementioned study [27] in order to compare the experimental results to the model used to describe ion emission from metallic and semi-conducting surfaces. For this purpose the simulation code TRIDYN is used [31][32][33].…”

SIMS on FIB Instruments: a Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics

“…When using typical ion species used in FIB-based instrumentation such as Ga or noble gases, the intrinsic yields are low compared to the ones found in conventional SIMS. However, the yields may be drastically increased by using reactive gas flooding during analysis, namely O 2 flooding for positive secondary ions and Cs flooding for negative secondary ions [1][2][3]. Our results show that both negative and positive ion yields obtained with Ga + , He + and Ne + bombardment may be increased by up to 4 orders of magnitude when using such reactive gas flooding ( Figure 1).…”

Quantification of a Ti(CxN1−x) based multilayer by Auger Electron Spectroscopy

“…The Cation Mass Spectrometer (CMS), which has been developed in the Science and Analysis of Materials (SAM) department, is a unique instrument specially dedicated to the quantification by the SIMS technique and has already been fully described in previous work [26][27][28][29][30][31][32][33][34][35][36][37][38]. It associates a simultaneous deposition of neutral Cs to the ion bombardment in order to optimise the useful yield of MCs x + or M À secondary ions and thus allows quantification of the measurements.…”