2020
DOI: 10.1007/s10854-020-03246-5
|View full text |Cite
|
Sign up to set email alerts
|

Silver diffusion effects in aluminum nitride/silver films on polydimethylsiloxane gratings via nitrogen–argon sputtering

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2022
2022
2022
2022

Publication Types

Select...
1

Relationship

0
1

Authors

Journals

citations
Cited by 1 publication
(1 citation statement)
references
References 20 publications
0
1
0
Order By: Relevance
“…The X-ray diffraction (XRD) analysis confirms the successful deposition of AlN with low crystallinity (Figure a). , It is interesting to note that the AlN in the AlN/Ag coating is amorphous, given the significantly reduced peaks as compared to the baseline. This can be explained by the fact that the diffusion energy of Ag nanoparticles and AlN molecules on the Zn foil surface is decreased due to the collision among Ag, AlN, and Ar/Ar + during the sputtering process, which inhibits the growth of AlN and Ag crystals and consequently promotes the even distribution of Ag in the AlN matrix (Figure a). , X-ray photoelectron spectroscopy (XPS) was then employed to probe the surface chemical states of AlN and AlN/Ag coatings (Figure S2). The strong Al 2p and N 1s peaks of AlN located at 74.2 and 397.2 eV, respectively, are attributed to the Al–N bonds .…”
Section: Resultsmentioning
confidence: 99%
“…The X-ray diffraction (XRD) analysis confirms the successful deposition of AlN with low crystallinity (Figure a). , It is interesting to note that the AlN in the AlN/Ag coating is amorphous, given the significantly reduced peaks as compared to the baseline. This can be explained by the fact that the diffusion energy of Ag nanoparticles and AlN molecules on the Zn foil surface is decreased due to the collision among Ag, AlN, and Ar/Ar + during the sputtering process, which inhibits the growth of AlN and Ag crystals and consequently promotes the even distribution of Ag in the AlN matrix (Figure a). , X-ray photoelectron spectroscopy (XPS) was then employed to probe the surface chemical states of AlN and AlN/Ag coatings (Figure S2). The strong Al 2p and N 1s peaks of AlN located at 74.2 and 397.2 eV, respectively, are attributed to the Al–N bonds .…”
Section: Resultsmentioning
confidence: 99%