Thomas David, Denis Buttard, Martien Den Hertog, Pascal Gentile, Thierry Baron, Pierre Ferret, Jean-Luc Rouvière
We present the growth of single-crystal silicon nanowires using a Vapor Liquid Solid (VLS) method (with gold colloids as catalysts) in nanoporous anodic alumina on 100 oriented silicon substrate. Results from scanning and transmission electron microscopy are presented and discussed. The nanowires (diameter of 20-50 nm) are forced to grow self-organized perpendicularly to the silicon substrates over large areas, even on 100 oriented substrates, and are surrounded by an insulating alumina coating. The usual 111…
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