2022
DOI: 10.1021/acs.chemmater.2c01899
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Si Electrochemical Liquid Phase Epitaxy: Low-Temperature Growth of Hyperdoped Epitaxial Si Films

Abstract: Epitaxial films of Si have been prepared at room temperature by electrochemical liquid phase epitaxy (ec-LPE). Crystalline Si films were grown on both Si(111) and Si(100) substrates, demonstrating clear evidence of low-temperature homoepitaxy. The ec-LPE method was demonstrated as a hybrid approach that combined elements of conventional electrodeposition and traditional liquid phase epitaxy. Voltammetric and amperometric data were collected that indicated conditions where Si ec-LPE is possible with SiCl 4 in p… Show more

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Cited by 6 publications
(13 citation statements)
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“…B. Bartels, H. Maldonado, S. 10.1021/acs.chemmater.2c01899Chem. Mater.2022341086110872 Evidence for Facilitated Surface Transport during Ge Crystal Growth by Indium in Liquid Hg-In Alloys at Room TemperaturePattadarD.CheekQ.SartoriA.ZhaoY.GiriR.…”
Section: Key Referencesmentioning
confidence: 99%
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“…B. Bartels, H. Maldonado, S. 10.1021/acs.chemmater.2c01899Chem. Mater.2022341086110872 Evidence for Facilitated Surface Transport during Ge Crystal Growth by Indium in Liquid Hg-In Alloys at Room TemperaturePattadarD.CheekQ.SartoriA.ZhaoY.GiriR.…”
Section: Key Referencesmentioning
confidence: 99%
“…We used a pulsed electrodeposition waveform (Figure g) that prevents the accumulation of deleterious side products . Macroscopic Si epifilms with micrometer thicknesses were then readily obtained (Figures h,i).…”
Section: Controlling the Location Of Nucleation And Crystal Growthmentioning
confidence: 99%
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“…Electrochemical cells can support the direct electrification of chemical manufacturing and construction (9)(10)(11)(12)(13)(14). The electrochemical reduction of iron oxide, using electricity sourced from lowcarbon, renewable resources (i.e.…”
Section: Introductionmentioning
confidence: 99%
“…The use of liquid metal catalysts for the growth of semiconductor crystals has been introduced to electrochemical systems by Maldonado, , and so-called electrochemical liquid–liquid–solid (ec-LLS) has been applied for the electrochemical growth of various semiconductors such as Ge, GaAs, and Si. , During VLS and ec-LLS growth, the liquid metal catalyst significantly affects all aspects of the Si crystal, such as the growth rate, shape, crystal structure, and doping. , Similarly, the use of a liquid catalyst might be another strategy for the electrochemical growth of high-quality Si. However, its role in the electrochemical growth in molten salt remains uncertain because photoactive Si and a controllable doping can be obtained without a liquid metal catalyst. ,,, In this study, the role of the liquid metal catalyst was investigated thoroughly by comparing the properties of Si grown with and without a liquid metal catalyst.…”
Section: Introductionmentioning
confidence: 99%