DOI: 10.1109/isscc.1981.1156247
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R. Jaeger

Abstract: An engineer's natural curiosity leads him to continually explore the frontiers of technology and to improve performance wherever possible. The limits of silicon integrated circuit technology are being extended in many directions as exemplified in reports in this session on MOS and bipolar device technology,The fundamental limits to VLSl are cited in an introductory paper that notes the problems imposed not only by the physics of MOS devices, but also by circuit, chip and system considerations. Recent results …

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