DOI: 10.1109/isscc.1982.1156414
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Abstract: During the past several years, many have pursued the development of microwave frequency monolithic circuits in an effort to realize the benefits of reproducibility and low cost, matching results achieved at lower frequencies with silicon integrated circuits. Most of the microwave circuits have been fabricated on gallium arsenide which offers the advantage of built-in isolation by means of its semi. insulating substrate. Silicon is also of interest because of the inexpensiveness of the starting material and th…

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