Sensing mode coupling analysis for dual-mass MEMS gyroscope and bandwidth expansion within wide-temperature range

Cao, Huiliang; Li, Hongsheng; Shao, Xingling; Liu, Zhiyu; Kou, Zhiwei; Shan, Yanhu; Shi, Yunbo; Shen, Chong; Liu, Jun

doi:10.1016/j.ymssp.2017.05.003

Cited by 61 publications

(51 citation statements)

References 19 publications

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“…Yang proposed that architecture use an on-chip temperature sensor to achieve on-chip temperature compensation, and a micro-heater to realize on-chip temperature control of the sensor [6]. Cao analyzed the noise and temperature compensation method of the MEMS gyroscope and studied the circuit interface structure and bandwidth of the MEMS sensor, effectively suppressing the noise of the MEMS sensor [7][8][9][10]. To a certain extent, the hardware compensation method does not only increase the volume and power consumption of the accelerometer, but also increases costs, so the hardware method is not applicable in applications that require low cost and low power consumption.…”

Section: Introductionmentioning

confidence: 99%

Temperature Drift Compensation for High-G MEMS Accelerometer Based on RBF NN Improved Method

Zhu

Pang²,

Zhang

et al. 2019

Applied Sciences

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In this paper, the method for compensating the temperature drift of high-G MEMS accelerometer (HGMA) is proposed, including radial basis function neural network (RBF NN), RBF NN based on genetic algorithm (GA), RBF NN based on GA with Kalman filter (KF), and the RBF NN + GA + KF method compensated by the temperature drift model. First, this paper introduces an HGMA structure working principle, conducts a finite element analysis, and produces the results. The simulation results show that the HGMA working mode is the 1st order mode, and its resonant frequency is 408 kHz. The 2nd order mode resonant frequency is 667 kHz, and the gap with the first mode is 260 kHz, indicating that the coupling movement between the two modes is tiny, so the HGMA has good linearity. Then, a temperature experiment is performed to obtain the output value of HGMA. The output values of HGMA are analyzed and optimized by using the algorithms proposed in this paper. The processing results show that the RBF NN + GA + KF method compensated by the temperature drift model achieves the best denoing consequent. The processing results show that the temperature drift of the HGMA is effectively compensated. The final results show that acceleration random walking improved from 17130 g/h/Hz0.5 to 765.3 g/h/Hz0.5, and bias stability improved from 4720 g/h to 57.27 g/h, respectively. The results show that after using the RBF NN + GA + KF method, combined with the temperature drift model, the temperature drift trend and noise characteristics of HGMA are well optimized.

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Section: Introductionmentioning

confidence: 99%

Temperature Drift Compensation for High-G MEMS Accelerometer Based on RBF NN Improved Method

Zhu

Pang²,

Zhang

et al. 2019

Applied Sciences

Self Cite

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“…This process is time-consuming. The phenomenon of mode aliasing still exists in EEMD, especially in the strong noise environment, and its signal processing effect is very unsatisfactory [34][35][36][37][38][39]. Singular spectral analysis (SSA) is a mathematical analysis method based on principal component analysis for non-parametric spectral estimation.…”

Section: Introductionmentioning

confidence: 99%

Application of a Novel Adaptive Med Fault Diagnosis Method in Gearboxes

Guo

Han

et al. 2019

Entropy

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Minimum entropy deconvolution (MED) is not effective in extracting fault features in strong noise environments, which can easily lead to misdiagnosis. Moreover, the noise reduction effect of MED is affected by the size of the filter. In the face of different vibration signals, the size of the filter is not adaptive. In order to improve the efficiency of MED fault feature extraction, this paper proposes a firefly optimization algorithm (FA) to improve the MED fault diagnosis method. Firstly, the original vibration signal is stratified by white noise-assisted singular spectral decomposition (SSD), and the stratified signal components are divided into residual signal components and noisy signal components by a detrended fluctuation analysis (DFA) algorithm. Then, the noisy components are preprocessed by an autoregressive (AR) model. Secondly, the envelope spectral entropy is proposed as the fitness function of the FA algorithm, and the filter size of MED is optimized by the FA algorithm. Finally, the preprocessed signal is denoised and the pulse enhanced with the proposed adaptive MED. The new method is validated by simulation experiments and practical engineering cases. The application results show that this method improves the shortcomings of MED and can extract fault features more effectively than the traditional MED method.

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“…With the introduction of circulatory flow, the integration and miniaturization of measuring systems significantly enhance the capability and impact of microfluidic systems [11]- [15]. A majority of applications of circulatory flow in a confined space are in the inertial sensing and particular angular rate sensing where the advantage of a self-contained valveless micropump reduces the risk of damage to mechanical counterparts [16]- [19]. For such applications, many different approaches were developed to generate a jet flow.…”

Section: Introductionmentioning

confidence: 99%

Fluidic mechanism for dual-axis gyroscope

Dau

Dinh

Tran

et al. 2018

Mechanical Systems and Signal Processing

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In this paper, we report a further study of flow-network generating four jet flows which circulate in a sealed device to experimentally investigate the feasibility and efficiency of a dual-axis gyroscope. The experiment is carried out successfully and the experimental results reasonably agreed with those obtained by numerical analysis using OpenFOAM. The flow rectifying coefficient is determined using the mathematical lump model for a vibrating system, which takes into account of the device geometry and resonant frequency. Experimental and numerical results demonstrate that the coefficient of the new system developed in this study is significantly higher than those of conventional designs. The hotwire-integrated device which can function as a dual-axis gyroscope is tested using a turntable with speeds up to 1900 rpm. The scale factor and cross-sensitivity of the system are 0.26 μVs/° and 1.2 %, respectively. The cross-sensitivity and the effects of linear acceleration, actuating voltage on the diaphragm, heating power and position of hotwires are also investigated.

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Sensing mode coupling analysis for dual-mass MEMS gyroscope and bandwidth expansion within wide-temperature range

Cited by 61 publications

References 19 publications

Temperature Drift Compensation for High-G MEMS Accelerometer Based on RBF NN Improved Method

Temperature Drift Compensation for High-G MEMS Accelerometer Based on RBF NN Improved Method

Application of a Novel Adaptive Med Fault Diagnosis Method in Gearboxes

Fluidic mechanism for dual-axis gyroscope

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