“…Since their introduction to the market as detectors in automotive airbag systems in the 1980s, Microelectromechanical System (MEMS) accelerometers have been employed in an ever-increasing number of mechatronic and electronic systems. Whereas some modern applications, e.g., in smartphones [1] and the like (tablets, photo cameras, and smartwatches [2]), may not be so strategic, there are other devices, e.g., automotive safety systems like the said airbag or a new generation of motorcycle ABS [3], or even diving instruments [4], where MEMS accelerometers are directly responsible for the protection of human life-then, the related aging effects become as critical as the results of aging of, e.g., social infrastructures such as bridges and other essential infrastructure systems [5]; health monitoring of such structures is a solution increasing safety of their users [6,7].…”