2010 3rd International Nanoelectronics Conference (INEC) 2010 Help me understand this report
Scanning parameters optimization for digital PI controller
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“…This also improved the dynamic response in the Z direction at high-speed. The control system includes automatic levelling feed forward control 21 to compensate for uneven sample placement, last line based feed forward control for advance pre-position, 22 and dynamic P parameter PI feedback control. 23 Periodic mechanical vibration evidently takes place due to vertical coupling of the piezoelectric actuator when the AFM tip moves at high speed in the X and Y directions.…”
mentioning
confidence: 99%
“…This also improved the dynamic response in the Z direction at high-speed. The control system includes automatic levelling feed forward control 21 to compensate for uneven sample placement, last line based feed forward control for advance pre-position, 22 and dynamic P parameter PI feedback control. 23 Periodic mechanical vibration evidently takes place due to vertical coupling of the piezoelectric actuator when the AFM tip moves at high speed in the X and Y directions.…”
mentioning
confidence: 99%
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