Scanning electron diffraction tomography of strain
Robert Tovey,
Duncan N. Johnstone,
Sean M. Collins
et al.
Abstract:Strain engineering is used to obtain desirable materials properties in a range of modern technologies. Direct nanoscale measurement of the three-dimensional strain tensor field within these materials has however been limited by a lack of suitable experimental techniques and data analysis tools. Scanning electron diffraction has emerged as a powerful tool for obtaining two-dimensional maps of strain components perpendicular to the incident electron beam direction. Extension of this method to recover the full th… Show more
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