Rolled-up SiO x /SiN x microtubes with an enhanced quality factor for sensitive solvent sensing

Song, Pengfei; Chen, Cheng; Qu, Juntian; Ou, Pengfei; Dastjerdi, Hadi Tavakoli; Mi, Zetian; Song, Jun; Liu, Xinyu

doi:10.1088/1361-6528/aad0b1

Cited by 12 publications

(9 citation statements)

References 43 publications

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“…Especially, it can be used for making an optofluidic sensor for bioanalytic systems, which is able to detect and analyze individual cells, biomolecules, and their bioactivities. [55,56]…”

Section: Tunable Optical Resonatormentioning

confidence: 99%

Elasto‐Capillary Manipulation of Freestanding Inorganic Nanosheets: An Implication for Nano‐Manufacturing of Low‐Dimensional Structures

Wang

Zhou

et al. 2022

Adv Materials Inter

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atomic-scale (e.g., graphene, [12] MoS 2 [13] ), ultrathin nanomaterials exhibit outstanding mechanical, optical, and electrical properties. [6,10,14,15] Therefore, they have been attracting tremendous research interest in both academia and industries in recent years. Nonetheless, controlled manipulation of these ultrathin nanomaterials poses a general challenge to their applications. [16] To fabricate microor nano-devices, nanomaterials need to be purposely structured [16] and transferred [17,18] while any resultant deformation, such as the formation of curvatures and folds, [16] could change their electronic and photonic properties. On the other hand, because of their extremely low flexural rigidity, ultrathin nanomaterials can be easily deformed and/or even damaged by external stimuli (e.g., by solid-solid contacts). In addition, the presence of in-plane residual stress often leads to the rolling or twisting of ultrathin nanomaterials. [19,20] Therefore, it has never been straightforward to manipulate ultrathin nanomaterials in a controlled manner.Over the past years, tremendous efforts have been dedicated to structuring and manipulating ultrathin nanomaterials for real applications. According to the literature, [16,[21][22][23][24] the Ultrathin inorganic nanosheets (e.g., 2D nanomaterials, thin films, etc.) have attracted tremendous research interest because of their unique properties and promising applications. However, because of their ultrathin thickness (<100 nm) and low flexural rigidity, it is difficult to manufacture low-dimensional structures using these nanosheets. In this work, the observation of an intriguing elasto-capillary unfolding phenomenon is first reported which occurs on a variety of freestanding inorganic nanosheets floating on a liquid surface. Through theoretical modeling and experiments, it is demonstrated that one can easily unfold, re-roll, and transport different kinds of nanosheets by tuning the interfacial properties of the liquid. As a result, one can assemble nanosheets on the liquid surface into small structures (e.g., heterogeneous scrolls, optical resonators) and/or transfer them out of the liquid surface onto other surfaces for the manufacturing of flexible devices. The outcome of this research paves the way for nano-manufacturing of low-dimensional structures with ultrathin inorganic nanosheets.

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“…Especially, it can be used for making an optofluidic sensor for bioanalytic systems, which is able to detect and analyze individual cells, biomolecules, and their bioactivities. [55,56]…”

Section: Tunable Optical Resonatormentioning

confidence: 99%

Elasto‐Capillary Manipulation of Freestanding Inorganic Nanosheets: An Implication for Nano‐Manufacturing of Low‐Dimensional Structures

Wang

Zhou

et al. 2022

Adv Materials Inter

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“…Notorious examples are microcylinders, [ 1,2 ] cubes, [ 3 ] and other polyhedrons, [ 4 ] which have already found applications, for instance, in electronics, [ 5–7 ] photonics, [ 8,9 ] and biology. [ 10–12 ] Self‐assembly by the roll‐up of structured thin‐film stacks into tubular “Swiss rolls” has been particularly successful in creating micromachined devices such as inductors, [ 13,14 ] capacitors, [ 15,16 ] microrobots, [ 17–19 ] and optical resonators [ 20–22 ] to only name a few. However, wet‐release techniques that are used in the fabrication of these microtubular architectures often suffer from serious stiction and damage problems due to the presence of capillary forces and aggressive reagents, resulting in limited yield, reproducibility, uniformity, and an overall deterioration of the device performance.…”

Section: Figurementioning

confidence: 99%

Wafer‐Scale High‐Quality Microtubular Devices Fabricated via Dry‐Etching for Optical and Microelectronic Applications

et al. 2020

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Mechanical strain formed at the interfaces of thin films has been widely applied to self‐assemble 3D microarchitectures. Among them, rolled‐up microtubes possess a unique 3D geometry beneficial for working as photonic, electromagnetic, energy storage, and sensing devices. However, the yield and quality of microtubular architectures are often limited by the wet‐release of lithographically patterned stacks of thin‐film structures. To address the drawbacks of conventionally used wet‐etching methods in self‐assembly techniques, here a dry‐release approach is developed to roll‐up both metallic and dielectric, as well as metallic/dielectric hybrid thin films for the fabrication of electronic and optical devices. A silicon thin film sacrificial layer on insulator is etched by dry fluorine chemistry, triggering self‐assembly of prestrained nanomembranes in a well‐controlled wafer scale fashion. More than 6000 integrated microcapacitors as well as hundreds of active microtubular optical cavities are obtained in a simultaneous self‐assembly process. The fabrication of wafer‐scale self‐assembled microdevices results in high yield, reproducibility, uniformity, and performance, which promise broad applications in microelectronics, photonics, and opto‐electronics.

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“…Song and other researchers prepared a kind of WGM sensor with high sensitivity based on rolled‐up microtube optical microcavities (RUM‐OCs) with nanomaterial SiO x /SiN x , which was used for the detection of sensitive solvents. Its LOD was 10 −4 RIU . In recent years, graphene has been widely used in many fields because of its stable chemical properties and strong biocompatibility.…”

Section: Structure and Application Of Wgmrsmentioning

confidence: 99%

“…Its LOD was 10 À4 RIU. [177] In recent years, graphene has been widely used in many fields because of its stable chemical properties and strong biocompatibility. In 2019, Wang and team proposed a graphene-activated photo-plasma chamber based on rolled up nanofilm and used it to monitor the photodegradation dynamics of organic dye molecule R6G in real time, as shown in Figure 9c.…”

Section: Special Wgmrsmentioning

confidence: 99%

Whispering Gallery Mode Optical Microresonators: Structures and Sensing Applications

Cai

Pan

Zhao

et al. 2020

Physica Status Solidi (a)

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Whispering gallery mode resonators (WGMRs) have achieved significant results due to their unique properties such as extremely small mode volume, ultra‐high quality (Q) factor, fast dynamic response, and ultra‐high sensitivity. WGM is commonly used in theoretical physics research, nonlinear optics, optoelectronic devices, and the preparation of high‐sensitivity sensors. This article briefly introduces the basic characteristics and sensing principle of WGM, the manufacturing method of WGMRs, and the sensing applications of microresonators in the fields of physics, chemistry, and biology. The detection limits of physical parameters and the detection sensitivity of biomolecules in recent decades are summarized. In addition, the advantages and disadvantages of different structures and the development trend of WGMRs applications are discussed.

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Rolled-up SiO_x/SiN_x microtubes with an enhanced quality factor for sensitive solvent sensing

Cited by 12 publications

References 43 publications

Elasto‐Capillary Manipulation of Freestanding Inorganic Nanosheets: An Implication for Nano‐Manufacturing of Low‐Dimensional Structures

Elasto‐Capillary Manipulation of Freestanding Inorganic Nanosheets: An Implication for Nano‐Manufacturing of Low‐Dimensional Structures

Wafer‐Scale High‐Quality Microtubular Devices Fabricated via Dry‐Etching for Optical and Microelectronic Applications

Whispering Gallery Mode Optical Microresonators: Structures and Sensing Applications

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