Review of micromachining of ceramics by etching

Ting, Huey Tze; Abou-El-Hossein, Khaled; Chua, Han Bing

doi:10.1016/s1003-6326(10)60237-3

Cited by 29 publications

(12 citation statements)

References 59 publications

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“…In comparison to direct laser ablation the MRR and aspect ratio of LCM/E are smaller but it involves little heat generation [81] and thus thermal effects do not occur [82]. Therefore, laser chemical etching is quite suitable for machining wide range of materials not only thick samples [83] but also thin foils [84] and even wafers with high precision and ultra-smooth surface with nm level roughness [85].…”

Section: Laser Chemical Machining / Etching (Lcm/e)mentioning

confidence: 99%

Laser Ablation and Laser-Hybrid Ablation Processes: A Review

Ahmed¹,

Darwish²,

Alahmari³

2015

Materials and Manufacturing Processes

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Laser beam machining (LBM) has proven its applications and advantages over almost all the range of engineering materials. It offers its competences from macro machining to micro and nano-machining of simple-to-complex shapes. The hybrid approaches in laser ablation have demonstrated much improved results in terms of material removal rate, surface integrity, geometrical tolerances, thermal damage, metallurgical alterations and many more. The flipside of LBM is the existence of universal problems associated with its thermal ablation mechanism. In order to alleviate or reduce the inherent problems of LBM, a massive research has been done during the past decade in order to build a relatively new route of laser-hybrid processes. This paper reviews the research work carried out so far in the area of LBM and its hybrid processes for different materials and shapes. The article also highlights the research gaps and future research directions in the context of laser and laser-hybrid ablation.

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Section: Laser Chemical Machining / Etching (Lcm/e)mentioning

confidence: 99%

Laser Ablation and Laser-Hybrid Ablation Processes: A Review

Ahmed¹,

Darwish²,

Alahmari³

2015

Materials and Manufacturing Processes

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“…Furthermore, micro-cracks do not occur. Therefore, laser chemical etching is quite suitable for machining a wide range of materials not only thick samples [125] but also thin foils [126] and even wafers with high precision and ultra-smooth surface with nm level roughness [127]. The experimental setup used in laser thermochemical machining is shown in Fig.…”

Section: Laser Chemical Machining/etching (Lcm/e)mentioning

confidence: 99%

Laser Beam Machining, Laser Beam Hybrid Machining, and Micro-channels Applications and Fabrication Techniques

Darwish

Ahmed

Al‐Ahmari

2016

Machining, Joining and Modifications of Advanced Materials

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Laser beam machining (LBM) has proven its applications and advantages over almost all the range of engineering materials. It offers its competences from macro machining to micro and nano-machining of simple-to-complex shapes. The flipside of LBM is the existence of universal problems associated with its thermal ablation mechanism. In order to alleviate or reduce the inherent problems of LBM, a massive research has been done during the past decade and in turn build a relatively new route of laser-hybrid processes. The hybrid approaches in laser ablation have demonstrated much improved results in terms of material removal rate, surface integrity, geometrical tolerances, thermal damage, metallurgical alterations and many more. This chapter reviews the research work carried out so far in the area of LBM and its hybrid processes for different materials and shapes.

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“…For machining grooves even with pico-second or femto-second laser pulses this cannot be completely avoided. Therefore, laser chemical etching is quite suitable for machining a wide range of materials not only thick samples [125] but also thin foils [126] and even wafers with high precision and ultra-smooth surface with nm level roughness [127]. Therefore, LBM's many drawbacks (such as detrimental thermal effects, recast or re-deposition of evaporated material) can be avoided [118].…”

Section: Laser Chemical Machining/etching (Lcm/e)mentioning

confidence: 99%