2016
DOI: 10.1038/srep20550
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Resistance switching behavior of atomic layer deposited SrTiO3 film through possible formation of Sr2Ti6O13 or Sr1Ti11O20 phases

Abstract: Identification of microstructural evolution of nanoscale conducting phase, such as conducting filament (CF), in many resistance switching (RS) devices is a crucial factor to unambiguously understand the electrical behaviours of the RS-based electronic devices. Among the diverse RS material systems, oxide-based redox system comprises the major category of these intriguing electronic devices, where the local, along both lateral and vertical directions of thin films, changes in oxygen chemistry has been suggested… Show more

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Cited by 18 publications
(9 citation statements)
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“…At this point it should be noted that, under reducing and oxidizing conditions at high temperatures, changes of the crystal geometry of the surface layer can be induced, due to modifications of the stoichiometry. This has been found by X-ray and TEM investigations showing the evolution of Magnéli phases or low Ti oxides of reduced TiO2 [53,116,117] and reduced SrTiO3 or BaTiO3 [118][119][120][121] or the creation of Ruddlesden Popper phases under oxidizing/reducing conditions, or after electrical polarization at room temperature [118,119,122]. Those effects can dramatically modify the height of the steps on the surface (see.…”
Section: Annihilations or Multiplications Of Dislocationsmentioning
confidence: 99%
See 1 more Smart Citation
“…At this point it should be noted that, under reducing and oxidizing conditions at high temperatures, changes of the crystal geometry of the surface layer can be induced, due to modifications of the stoichiometry. This has been found by X-ray and TEM investigations showing the evolution of Magnéli phases or low Ti oxides of reduced TiO2 [53,116,117] and reduced SrTiO3 or BaTiO3 [118][119][120][121] or the creation of Ruddlesden Popper phases under oxidizing/reducing conditions, or after electrical polarization at room temperature [118,119,122]. Those effects can dramatically modify the height of the steps on the surface (see.…”
Section: Annihilations or Multiplications Of Dislocationsmentioning
confidence: 99%
“…The nature of electroformation and switching along nano-filaments in single crystals is still under discussion [29,[47][48][49][50][51][52][53][54][55]262,263]. One issue, which has not been dealt with in this chapter, is related to the possibility of a local transformation of the model binary and ternary oxides (here TiO 2 O 20 , [57,121,182,[264][265][266][267]) under electrical stimuli. Such solid-state transformations are most likely connected with extended defects.…”
Section: Role Of Dislocations In Resistive Switching Of Tio2 and Srtimentioning
confidence: 99%
“…In previous studies, different microscopy techniques, including scanning tunneling microscopy, , local conduction atomic force microscopy, X-ray absorption spectroscopy (XAS), and transmission electron microscopy (TEM), have been applied to study the conducting filaments and to obtain a better understanding of their structural nature. In particular for ECM materials (i.e., SiO 2 ), TEM has shown the capability to reveal the structural details of the ECM mechanism. , For the best-known prototype VC material SrTiO 3 , XAS has been demonstrated to be a successful technique to explore the Ti valence change and O-vacancies. Nevertheless, by means of XAS it is hardly possible to visualize the local structural details of individual filaments on the atomic scale due to the limit of the lateral resolution of the technique (≥25 nm).…”
mentioning
confidence: 99%
“…SrTiO 3 model systems, i.e., epitaxial structures, , bicrystals, and engineered dislocations, are currently under intense investigation in order to understand the fundamental mechanism of resistive switching. Extended defects, such as one-dimensional dislocations ,, and two-dimensional stacking faults, , as well as secondary oxygen deficient phases, e.g., Sr 2 Ti 6 O 13 /SrTi 11 O 20 in polycrystalline films, have been associated with the conducting filaments. The defects essential to the conducting filament formation and disruption are still under debate.…”
mentioning
confidence: 99%
“…For the investigation of the performance of ternary metal oxides, strontium titanate (SrTiO 3 ) has become a prototype material due to the possibility of controlling its resistance between insulating, metallic and even superconducting behaviour related to a self-doping effect by oxygen vacancies 2 – 5 . While oxides with perovskite structure are regarded as very stable materials since many of them can be found in rocks, it has been shown recently that resistive switching is related to a local decomposition and phase transformation by an electroforming process resulting in the evolution of switchable nanofilamentary structures 6 , 7 . As the main driving force of this transformation, the movement of oxygen vacancies upon application of an electric field has been identified.…”
Section: Introductionmentioning
confidence: 99%