Abstract:This paper reviews our research progresses of hydrogenated amorphous silicon (a-Si:H) and microcrystalline (μc-Si:H) based thin film solar cells. It coves the three areas of high efficiency, low cost process, and large-area proto-type multi-chamber system design and solar module deposition. With an innovative VHF power profiling technique, we have effectively controlled the crystalline evolution and made uniform μc-Si:H materials along the growth direction, which was used as the intrinsic layers of pin solar c… Show more
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