2009
DOI: 10.4028/www.scientific.net/kem.416.137
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Abstract: In order to achieve high efficiency and low damaged layer during sapphire lapping process, experimental research on the correlation between the surface quality and the abrasive grains wear in dual-lapping processing sapphire. The sapphire surface quality was characterized by roughness. Sapphire with (0001) orientation was lapped by 280 # boron carbide abrasive grits. The abrasive grains were analyzed by a laser diffraction particles size analyzer. The micro-surface uniformity and roughness were also presented …

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