Reduction in feature size of two-photon polymerization using SCR500

Tan, Dengfeng; Li, Yudong; Qi, Fengjie; Yang, Hong; Gong, Qihuang; Dong, Xian‐Zi; Duan, Xuan‐Ming

doi:10.1063/1.2535504

Cited by 216 publications

(124 citation statements)

References 18 publications

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“…1,2 Femtosecond lasers are frequently used to create 3D patterns in polymers and glasses. [3][4][5][6][7] However, 3D metal direct-writing remains a challenge. Here, we describe a method to fabricate silver nanostructures embedded inside a polymer matrix using a femtosecond laser centered at 800 nm.…”

mentioning

confidence: 99%

A Method to Fabricate Disconnected Silver Nanostructures in 3D

Vora

Kang

Mazur

2012

JoVE

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The standard nanofabrication toolkit includes techniques primarily aimed at creating 2D patterns in dielectric media. Creating metal patterns on a submicron scale requires a combination of nanofabrication tools and several material processing steps. For example, steps to create planar metal structures using ultraviolet photolithography and electron-beam lithography can include sample exposure, sample development, metal deposition, and metal liftoff. To create 3D metal structures, the sequence is repeated multiple times. The complexity and difficulty of stacking and aligning multiple layers limits practical implementations of 3D metal structuring using standard nanofabrication tools. Femtosecond-laser direct-writing has emerged as a pre-eminent technique for 3D nanofabrication. 1,2 Femtosecond lasers are frequently used to create 3D patterns in polymers and glasses. [3][4][5][6][7] However, 3D metal direct-writing remains a challenge. Here, we describe a method to fabricate silver nanostructures embedded inside a polymer matrix using a femtosecond laser centered at 800 nm. The method enables the fabrication of patterns not feasible using other techniques, such as 3D arrays of disconnected silver voxels. 8 Disconnected 3D metal patterns are useful for metamaterials where unit cells are not in contact with each other, 9 such as coupled metal dot 10,11 or coupled metal rod 12,13 resonators. Potential applications include negative index metamaterials, invisibility cloaks, and perfect lenses.In femtosecond-laser direct-writing, the laser wavelength is chosen such that photons are not linearly absorbed in the target medium. When the laser pulse duration is compressed to the femtosecond time scale and the radiation is tightly focused inside the target, the extremely high intensity induces nonlinear absorption. Multiple photons are absorbed simultaneously to cause electronic transitions that lead to material modification within the focused region. Using this approach, one can form structures in the bulk of a material rather than on its surface.Most work on 3D direct metal writing has focused on creating self-supported metal structures. 14-16 The method described here yields submicrometer silver structures that do not need to be self-supported because they are embedded inside a matrix. A doped polymer matrix is prepared using a mixture of silver nitrate (AgNO 3 ), polyvinylpyrrolidone (PVP) and water (H 2 O). Samples are then patterned by irradiation with an 11-MHz femtosecond laser producing 50-fs pulses. During irradiation, photoreduction of silver ions is induced through nonlinear absorption, creating an aggregate of silver nanoparticles in the focal region. Using this approach we create silver patterns embedded in a doped PVP matrix. Adding 3D translation of the sample extends the patterning to three dimensions. Video LinkThe video component of this article can be found at

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mentioning

confidence: 99%

A Method to Fabricate Disconnected Silver Nanostructures in 3D

Vora

Kang

Mazur

2012

JoVE

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“…Precise control and stabilization of the laser intensity very close to the TPP threshold, together with an optimal writing speed, has enabled a fabrication resolution down to ca. 18 nm [60]. A more sophisticated approach to further improve the fabrication resolution in TPP was conducted by adopting the concept of stimulated emission depletion (STED) microscopy, which was originally developed for far-field nanoimaging of live cells [61].…”

Section: Challenges To Fabrication Resolution Far Beyond the Diffractmentioning

confidence: 99%

Progress in ultrafast laser processing and future prospects

Sugioka

2017

Nanophotonics

170

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Abstract:The unique characteristics of ultrafast lasers have rapidly revolutionized materials processing after their first demonstration in 1987. The ultrashort pulse width of the laser suppresses heat diffusion to the surroundings of the processed region, which minimizes the formation of a heat-affected zone and thereby enables ultrahigh precision micro-and nanofabrication of various materials. In addition, the extremely high peak intensity can induce nonlinear multiphoton absorption, which extends the diversity of materials that can be processed to transparent materials such as glass. Nonlinear multiphoton absorption enables three-dimensional (3D) micro-and nanofabrication by irradiation with tightly focused femtosecond laser pulses inside transparent materials. Thus, ultrafast lasers are currently widely used for both fundamental research and practical applications. This review presents progress in ultrafast laser processing, including micromachining, surface micro-and nanostructuring, nanoablation, and 3D and volume processing. Advanced technologies that promise to enhance the performance of ultrafast laser processing, such as hybrid additive and subtractive processing, and shaped beam processing are discussed. Commercial and industrial applications of ultrafast laser processing are also introduced. Finally, future prospects of the technology are given with a summary.

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“…So far, the 2PP process was primarily optimized for better process resolution, which is widely studied and reported. [16][17][18][19][20] At the same time, large-scale 2PP structuring to build structures with centimeter sizes and submicron resolution is required for many applications. However, in the conventional 2PP process, the structure height is limited by the working distance of the microscope objective used for focusing laser pulses into the photosensitive material.…”

Section: Introductionmentioning

confidence: 99%

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

et al. 2013

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We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures, with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup, where a microscope objective (1003 high N.A.), immersion oil and cover glass can be moved together into the photosensitive material, resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7 mm are demonstrated, which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.

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Reduction in feature size of two-photon polymerization using SCR500

Cited by 216 publications

References 18 publications

A Method to Fabricate Disconnected Silver Nanostructures in 3D

A Method to Fabricate Disconnected Silver Nanostructures in 3D

Progress in ultrafast laser processing and future prospects

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

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