2020 International Multi-Conference on Industrial Engineering and Modern Technologies (FarEastCon) 2020
DOI: 10.1109/fareastcon50210.2020.9271526
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Reducing the Temperature Error of Thin-Film Structures of Micromechanical Elements in Mechatronic Pressure Sensors

M. E. Kalinkina
1
,
V. L. Tkalich
2
,
O. I. Pirozhnikova
3
et al.
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