Due to their small size, low loss, and compatibility with integrated circuits, microelectromechanical systems (MEMS) have been the focus of recent efforts at developing frequency reconfigurable patch antennas able to operate at a number of different user-selected frequencies.
IntroductionMicrostrip patch antennas are desirable due to their ease of production, ruggedness, and conformability. However, such resonant antennas suffer from narrow bandwidths and fixed operating frequencies. Tuning the operating frequency of a patch antenna can overcome these limitations, allowing a single antenna design to serve a communications system operating on multiple channels.Recent reconfigurable planar antenna designs have capitalized on the low power, small geometries, and high performance characteristics of microelectromechanical systems (MEMS) to develop frequency tunable patch antennas. Discrete frequency tuning has been achieved using MEMS switches that reconfigure antenna geometries [3], and continuous frequency tuning has been achieved by loading antenna structures with MEMS variable capacitors. Although reactive loading with MEMS variable capacitors is a welldocumented method in reconfigurable antenna design [1], MEMS variable inductors have not received the same attention in that role.We present a continuous tuning method for a microstrip patch antenna using MEMS tunable inductors and capacitors. The tunable antennas studied in this research are designed for the 4-7 GHz range a 5.5 GHz unaltered operating frequency. The thermally actuated MEMS variable inductors and electrostatically actuated variable capacitors are variations of prior work on RF MEMS components [1]- [2]. The components are fabricated through the MetalMUMPs multiuser electroplated nickel micromachining process and are ultimately intended for use in a coplanar waveguide-fed patch antenna design described later in this paper.