2015
DOI: 10.1587/elex.12.20152001
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Recent progress in 3D integration technology

Abstract: 3D integration technology is the key for future LSIs with highperformance, low-power and multi-functionality. Especially, to mitigate various concerns caused by device scaling down to 10 nm or less, it is indispensable to introduce a new concept of heterogeneous 3D integration in which various kinds of materials, devices and technologies are integrated on a Si substrate. Future prospects of such a heterogeneous 3D integration technology has been discussed representing typical examples of heterogeneous 3D LSIs … Show more

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Cited by 22 publications
(19 citation statements)
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“…In Heterogeneous 3D integration has also been widely explored to overcome bandwidth and energy challenges for LSI chips. Details on some of the recent progress in 3D integration can be found in [5,17,18]. Stacking of LSI chips reduces the footprint and decreases the interconnect length allowing high bandwidth density interconnects between chips.…”
Section: Emerging Methodologiesmentioning
confidence: 99%
See 1 more Smart Citation
“…In Heterogeneous 3D integration has also been widely explored to overcome bandwidth and energy challenges for LSI chips. Details on some of the recent progress in 3D integration can be found in [5,17,18]. Stacking of LSI chips reduces the footprint and decreases the interconnect length allowing high bandwidth density interconnects between chips.…”
Section: Emerging Methodologiesmentioning
confidence: 99%
“…Recent advances in 2.5D [2,3] packaging as well as silicon interposer-level optical interconnects [4] have allowed high-bandwidth communication between chips (or stack of chips) on interposers. Similarly, 3D integration [5] has been widely explored to mitigate the interconnect latency and to improve bandwidth density between stacked dice. These new approaches, however, present a unique set of challenges that needs to be addressed for effective utilization and adoption of the technology.…”
Section: Introductionmentioning
confidence: 99%
“…Through Silicon Via (TSV) provides a promising way to achieve low latency and low power interdie connection and has gained considerable attention in threedimensional (3D) integration [1,2]. However, the yield of TSV-based 3D integrated circuits (ICs) is unsatisfactory in the semiconductor industry.…”
Section: Introductionmentioning
confidence: 99%
“…In traditional 2D processor, more circuits means larger area and longer wires, but the limit of long wire delay has been seem as an unsolved challenge [2]. To keep improving the performance of microprocessors and extend the capabilities of a single processor, three-dimensional integrated circuits (3D IC) is proposed [3].…”
Section: Introductionmentioning
confidence: 99%