Recent development and futuristic applications of MEMS based piezoelectric microphones

Kumar, Ajai; Varghese, Arathy; Sharma, Anup; Prasad, Mahanth; Janyani, Vijay; Yadav, R. P.; Elgaid, Khaled

doi:10.1016/j.sna.2022.113887

Cited by 24 publications

(17 citation statements)

References 63 publications

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“…2D materials and their composites, such as GPC, are projected to be fabricated into piezoresistive microphones given that some 2D materials and their composites exhibit high gauge factors (which measure the extent of resistance change with strain and generally, materials with higher gauge factors possess stronger piezoresistive characteristics) . [6,29,[189][190][191][192][193][194][195][196][197][198][199][200][201] However, currently, there is limited literature on 2D material-based piezoresistive microphones. One possible reason for this scarcity of research may be due to the inherent drawbacks of piezoresistive microphones, including a limited dynamic range and poor sensitivity.…”

Section: Other Types Of Electric Microphones Based On 2d Materials An...mentioning

confidence: 99%

“…From this, it can be observed that 2D materials with ultralarge area and atomic thinness are highly beneficial for enhancing microphone sensitivity. [6,203,204] Additionally, atomic thin films of 2D materials are so flexible that they can rapidly respond to sound waves of different frequencies, resulting in a broader resonance bandwidth.…”

Section: Other Types Of Electric Microphones Based On 2d Materials An...mentioning

confidence: 99%

“…The devices used to receive acoustic waves and convert them into human recognizable signals are called microphone. Microphones can be classified into several types based on their sound detection principles: 1) dynamic and ribbon microphones [ 1 ] (also known as electrodynamic microphones, Figure a); 2) condenser microphones [ 3 ] (Figure 9b); 3) piezoelectric microphones [ 6 ] (Figure 9c); 4) piezoresistive microphones [ 2 ] (also known as contact microphones) (Figure 9d). The aforementioned four main types of microphones are all based on circuit design.…”

Section: Acoustic Transducers In Audio Frequencymentioning

confidence: 99%

“…An acoustic wave is a type of mechanical wave that carries energy and information through the vibration of a medium with the motions of atoms and molecules. Acoustic devices, consisting of apparatus for emitting and receiving acoustic waves, play a crucial role in various fields, such as microphones, [1][2][3][4][5][6][7] speakers, [8][9][10][11][12][13][14] hearing aids, [15] industrial monitoring, [16] oceanography [17] and ultrasonic imaging systems. [18] In the realm of information technology and intelligent systems, there is also a pressing demand for acoustic devices that possess high performance, small size, low power consumption, and multifunctional capabilities.…”

Section: Introductionmentioning

confidence: 99%

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A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Wan,

Liu,

Zheng

et al. 2023

Adv Funct Materials

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Acoustic devices play an increasingly important role in modern society for information technology and intelligent systems, and recently significant progress has been made in the development of communication, sensing, and energy transduction applications. However, conventional material systems, such as polymers, metals and silicon, show limitations to fulfill the evolving requirements for high‐performance acoustic devices of small size, low power consumption, and multifunctional capabilities. 2D materials hold the promise in overcoming the development bottleneck of acoustic devices aforementioned, given their atomic‐thin thickness, extensive surface area, superior physical properties, and remarkable layer‐stacking tunability. By suspending the 2D materials, mechanical and thermal disruption from substrate will be eliminated, which will enable the development of new classes of acoustic devices with unprecedented sensitivity and accuracy. In this review, the recent progress of acoustic devices based on suspended 2D materials and their composites, especially applications in the audio frequency, static pressure, and ultrasonic frequency range, is briefly summarized, emphasizing the advantageous properties of suspended 2D materials and related outstanding device performance. Together with the development of 2D membrane synthesis, transfer, as well as microelectromechanical fabrication process, suspended 2D materials will shed light on the next‐generation high‐performance acoustic devices.

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Section: Other Types Of Electric Microphones Based On 2d Materials An...mentioning

confidence: 99%

Section: Other Types Of Electric Microphones Based On 2d Materials An...mentioning

confidence: 99%

Section: Acoustic Transducers In Audio Frequencymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Wan,

Liu,

Zheng

et al. 2023

Adv Funct Materials

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show abstract

“…[74,75] To develop a high-performance piezoelectric actuator, the piezoelectric layer should be flexible. Currently, many intrinsic flexible piezoelectric materials have been utilized, for example, poly(vinylidene fluoride) (PVDF), [76][77][78] polyureas, [79,80] polypeptides, [81,82] and other piezoelectric polymers. [75,83] Even though the piezoelectric coefficient of the organic piezoelectric material is relatively lower than traditional rigid piezoelectric ceramic, [84] the organic piezoelectric material is still a relatively excellent choice due to its good flexibility and easy preparation characteristics.…”

Section: Piezoelectric Soft Actuatorsmentioning

confidence: 99%

Recent Advances in Electrically Driven Soft Actuators across Dimensional Scales from 2D to 3D

et al. 2023

Advanced Intelligent Systems

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Soft actuators have been an important research focus in robotics due to their advantages in nondestructive contact and excellent motion adaptability, which enable flexible manipulation, extreme environments exploration, and in vivo surgical treatment. Various soft robots actuated electrically, magnetically, optically, and fluidically are built toward different application scenarios. Among them, electrical actuation method is an advanced choice to actuate and control soft actuators that are expected to be compatible and integrated with existing industrial robotic systems and wearable intelligent devices. Current robotic systems have higher requirements on the actuators’ function, which can be explored through material and structural designs. Based on a variety of deformable materials, the structural design enables the soft actuators to span from low dimension to high dimension with further improvement in function. Therefore, in this review, 2D and 3D electrical‐based soft actuators from the perspective of dimension design are introduced, which involve functional materials, structure design, and fabrication technology. Some novel 3D fabrication methods, such as the 3D compressive buckling process, are summarized to build 3D soft robots. This review aims at offering important guidelines for the development of soft actuators and the construction of integrated robotic systems in the future.

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Multi‐Length Engineering of (K, Na)NbO₃ Films for Lead‐Free Piezoelectric Acoustic Sensors with High Sensitivity

Liu,

Zhou,

Jiang

et al. 2023

Adv Funct Materials

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With increasing concerns about noise pollution, the pursuit of highly dependable piezoelectric acoustic sensors for real‐time noise monitoring has come to the forefront of scientific research. Lead‐based perovskite piezoelectric films, exemplified by lead zirconate titanate Pb(Zr,Ti)O3 (PZT), surpass traditional piezoelectric materials such as ZnO and AlN in their piezoelectric properties, promising substantial advancements in next‐generation acoustic sensor technologies. However, the toxic nature of lead in PZT materials poses formidable environmental and human health risks. In an unprecedented breakthrough, it presents the pioneering development of an environmentally benign lead‐free piezoelectric Micro‐Electro‐Mechanical System (MEMS) acoustic sensor based on potassium sodium niobate (K,Na)NbO3 (KNN) film. High‐quality <001> textured 3 µm‐thick KNN film is successfully integrated into commercially used Si substrate, rendering exceptional piezoelectricity (transverse piezoelectric coefficients e31* of ≈8.5 C m−2) with satisfactory thermal stability. The atomic‐scale Z‐contrast imaging and piezoresponse force microscopy characterizations reveal that the outstanding piezoresponse originates from the local coexistence of multiple phases and the enhancement of extrinsic piezoelectric contributions from in‐plane polarization anisotropy. Finite element simulation is employed to design the triangular cantilever structure and annular diaphragm structure, each corresponding to different operating bandwidths. The resultant MEMS acoustic sensors stand out with outstanding acoustic performance (the high sensitivity and expansive receiving field of view), which are attributed to the microstructural engineering at multi‐length scales for the excellent piezoelectric properties of KNN film. These features enable sensitive acoustic monitoring in various environments, including large‐scale power grids and urban traffic.

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Recent development and futuristic applications of MEMS based piezoelectric microphones

Cited by 24 publications

References 63 publications

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Recent Advances in Electrically Driven Soft Actuators across Dimensional Scales from 2D to 3D

Multi‐Length Engineering of (K, Na)NbO₃ Films for Lead‐Free Piezoelectric Acoustic Sensors with High Sensitivity

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Recent development and futuristic applications of MEMS based piezoelectric microphones

Cited by 24 publications

References 63 publications

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Recent Advances in Electrically Driven Soft Actuators across Dimensional Scales from 2D to 3D

Multi‐Length Engineering of (K, Na)NbO3 Films for Lead‐Free Piezoelectric Acoustic Sensors with High Sensitivity

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Product

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Multi‐Length Engineering of (K, Na)NbO₃ Films for Lead‐Free Piezoelectric Acoustic Sensors with High Sensitivity